Inventor · disambiguated record
Jui-Cheng Lo
Also filed as: LO JUI-CHENG
5 granted patents·2 pending applications·81 citations·filing 1995–2004
80Inventor score
Top patents by PatentIndex Score
7 records- 0164US6926584B2Dual mode hybrid control and method for CMP slurryTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 9, 2005·12 cites·15 claims
- 0263US5726102AMethod for controlling etch bias in plasma etch patterning of integrated circuit layersVANGUARD INT SEMICONDUCT CORP·Filed 1996·Granted Mar 10, 1998·34 cites·18 claims
- 0361US6860723B2Slurry flow control and monitor system for chemical mechanical polisherTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 1, 2005·9 cites·10 claims
- 0457US5667630ALow charge-up reactive ion metal etch processVANGUARD INT SEMICONDUCT CORP·Filed 1995·Granted Sep 16, 1997·26 cites·21 claims
- 0541US7125521B2Method to solve alignment mark blinded issues and technology for application of semiconductor etching at a tiny areaTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Oct 24, 2006·0 cites·10 claims
- 0634US2005202763A1Multi-function slurry delivery systemFiled 2004·Application pending·0 cites
- 0733US2003211743A1Method for avoiding slurry sedimentation in CMP slurry delivery systemsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →