Inventor · disambiguated record
Junya Nakahira
Also filed as: NAKAHIRA JUNYA
2 granted patents·131 citations·filing 1991–1994
69Inventor score
Files withFUJITSU LTD2
Top patents by PatentIndex Score
2 records- 0188US5620526AIn-situ cleaning of plasma treatment chamberFUJITSU LTD·Filed 1994·Granted Apr 15, 1997·69 cites·10 claims
- 0275US5231057AMethod of depositing insulating layer on underlying layer using plasma-assisted cvd process using pulse-modulated plasmaFUJITSU LTD·Filed 1991·Granted Jul 27, 1993·62 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →