Inventor · disambiguated record
Jun-Sig Park
Also filed as: PARK JUN SIG
5 granted patents·632 citations·filing 1997–2009
82Inventor score
Top patents by PatentIndex Score
5 records- 0198US5873942AApparatus and method for low pressure chemical vapor deposition using multiple chambers and vacuum pumpsSAMSUNG ELECTRONICS CO LTD·Filed 1997·Granted Feb 23, 1999·563 cites·15 claims
- 0276US6214689B1Apparatus for manufacturing semiconductor device, method of manufacturing capacitor of semiconductor device thereby, and resultant capacitorSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Apr 10, 2001·48 cites·6 claims
- 0354US6037272AApparatus and method for low pressure chemical vapor deposition using multiple chambers and vacuum pumpsSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted Mar 14, 2000·17 cites·6 claims
- 0451US6979368B2Apparatus and method for producing a semiconductor device including a byproduct control systemSAMSUNG ELECTRONICS CO LTD·Filed 2004·Granted Dec 27, 2005·4 cites·21 claims
- 0539US8221045B2Semiconductor device manufacturing apparatus and wafer loading/unloading method thereofPARK JUN-SIG·Filed 2009·Granted Jul 17, 2012·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →