Inventor · disambiguated record
Jung Hwan Um
Also filed as: UM JUNG HWAN
2 granted patents·4 pending applications·0 citations·filing 2016–2025
23Inventor score
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
6 records- 0169US2025149301A1Plasma processing apparatus including gas distribution plateSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 0269US2023033091A1Plasma processing apparatus including gas distribution plateSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 0354US2019304751A1Plasma processing apparatus including gas distribution plateSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
- 0440US10281520B2Diagnosing an abnormal state of a substrate-processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2017·Granted May 7, 2019·0 cites·8 claims
- 0540US9812293B2Dielectric window, plasma processing system including the window, and method of fabricating semiconductor device using the systemSAMSUNG ELECTRONICS CO LTD·Filed 2016·Granted Nov 7, 2017·0 cites·16 claims
- 0625US2019145002A1Showerhead and substrate processing device including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →