Inventor · disambiguated record
Katsuichi Akiyoshi
Also filed as: AKIYOSHI KATSUICHI
3 granted patents·2 pending applications·33 citations·filing 1994–2025
60Inventor score
Top patents by PatentIndex Score
5 records- 0168US5539855AApparatus for measuring the temperature of a substrateDAINIPPON SCREEN MFG·Filed 1994·Granted Jul 23, 1996·33 cites·17 claims
- 0252US11516884B2Light irradiation type heat treatment method and heat treatment apparatus that calculates a temperature of a substrate based on a treatment recipe applicable theretoSCREEN HOLDINGS CO LTD·Filed 2019·Granted Nov 29, 2022·0 cites·12 claims
- 0347US10679874B2Light irradiation type heat treatment apparatus and heat treatment methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jun 9, 2020·0 cites·2 claims
- 0446US2025349568A1Heat treatment method and heat treatment apparatus for heating substrate by light irradiationSCREEN HOLDINGS CO LTD·Filed 2025·Application pending·0 cites
- 0539US2019267261A1Light irradiation type heat treatment method and heat treatment apparatusSCREEN HOLDINGS CO LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →