Inventor · disambiguated record
Karsten Frenner
Also filed as: FRENNER KARSTEN
1 granted patent·1 pending application·0 citations·filing 2012–2016
9Inventor score
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2 records- 0129US2017089835A1Sensor Element For Photoluminescence Measurements, Photoluminescence Detection Means, Method For Operating Photoluminescence Detection Means, Method For Producing A Sensor Element And Use Of A Sensor ElementUNIV STUTTGART·Filed 2016·Application pending·0 cites
- 0228US8804123B2Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing methodOSTEN WOLFGANG MAX ADOLF BERNHARD·Filed 2012·Granted Aug 12, 2014·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →