Inventor · disambiguated record
Karlheinz Freywald
Also filed as: FREYWALD KARLHEINZ
2 granted patents·3 pending applications·4 citations·filing 2003–2007
45Inventor score
Top patents by PatentIndex Score
5 records- 0154US7989310B2Filling of insulation trenches using CMOS standard processes for creating dielectrically insulated areas on a SOI diskX FAB SEMICONDUCTOR FOUNDRIES·Filed 2005·Granted Aug 2, 2011·3 cites·9 claims
- 0236US8742536B2SOI disks comprising MEMS structures and filled isolating trenches having a defined cross-sectionFREYWALD KARLHEINZ·Filed 2005·Granted Jun 3, 2014·1 cites·7 claims
- 0328US2008100311A1Electrical Measurement Of The Thickness Of A Semiconductor LayerX FAB SEMICONDUCTOR FOUNDRIES·Filed 2005·Application pending·0 cites
- 0423US2011012236A1Evaluation of an undercut of deep trench structures in soi wafersFREYWALD KARLHEINZ·Filed 2007·Application pending·0 cites
- 0520US2006199298A1Creation of hermetically sealed dielectrically isolating trenchesFREYWALD KARLHEINZ·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →