Inventor · disambiguated record
Kai Gaebel
Also filed as: GAEBEL KAI
13 granted patents·1 pending application·201 citations·filing 2003–2007
93Inventor score
Files withXTREME TECH GMBH14
Top patents by PatentIndex Score
14 records- 0187US6882704B2Radiation source for generating extreme ultraviolet radiationXTREME TECH GMBH·Filed 2003·Granted Apr 19, 2005·43 cites·30 claims
- 0283US7599470B2Arrangement for generating extreme ultraviolet radiation from a plasma generated by an energy beam with high conversion efficiency and minimum contaminationXTREME TECH GMBH·Filed 2007·Granted Oct 6, 2009·22 cites·22 claims
- 0380US7250621B2Method and arrangement for the plasma-based generation of intensive short-wavelength radiationXTREME TECH GMBH·Filed 2005·Granted Jul 31, 2007·17 cites·34 claims
- 0479US7476884B2Device and method for generating extreme ultraviolet (EUV) radiationXTREME TECH GMBH·Filed 2006·Granted Jan 13, 2009·14 cites·32 claims
- 0579US7329014B2Collector mirror for plasma-based, short-wavelength radiation sourcesXTREME TECH GMBH·Filed 2006·Granted Feb 12, 2008·18 cites·25 claims
- 0678US7161163B2Method and arrangement for the plasma-based generation of soft x-radiationXTREME TECH GMBH·Filed 2005·Granted Jan 9, 2007·14 cites·26 claims
- 0777US6995382B2Arrangement for the generation of intensive short-wave radiation based on a plasmaXTREME TECH GMBH·Filed 2004·Granted Feb 7, 2006·22 cites·28 claims
- 0876US7233013B2Radiation source for the generation of short-wavelength radiationXTREME TECH GMBH·Filed 2006·Granted Jun 19, 2007·12 cites·9 claims
- 0975US7372057B2Arrangement for providing a reproducible target flow for the energy beam-induced generation of short-wavelength electromagnetic radiationXTREME TECH GMBH·Filed 2005·Granted May 13, 2008·12 cites·25 claims
- 1073US7405413B2Arrangement for providing target material for the generation of short-wavelength electromagnetic radiationXTREME TECH GMBH·Filed 2005·Granted Jul 29, 2008·10 cites·24 claims
- 1166US7122814B2Arrangement for the stabilization of the radiation emission of a plasmaXTREME TECH GMBH·Filed 2004·Granted Oct 17, 2006·11 cites·27 claims
- 1264US7218651B2Arrangement for the generation of a pulsed laser beam of high average outputXTREME TECH GMBH·Filed 2005·Granted May 15, 2007·2 cites·16 claims
- 1358US7274030B2Apparatus for the temporally stable generation of EUV radiation by means of a laser-induced plasmaXTREME TECH GMBH·Filed 2005·Granted Sep 25, 2007·4 cites·25 claims
- 1434US2006226377A1Plasma radiation sourceXTREME TECH GMBH·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →