Inventor · disambiguated record
Kazunari Hada
Also filed as: HADA KAZUNARI
7 granted patents·189 citations·filing 1982–1999
87Inventor score
Top patents by PatentIndex Score
7 records- 0173US4589139AApparatus for detecting defects in patternNIPPON KOGAKU KK·Filed 1983·Granted May 13, 1986·48 cites·10 claims
- 0273US4506382AApparatus for detecting two-dimensional pattern and method for transforming the pattern into binary imageNIPPON KOGAKU KK·Filed 1982·Granted Mar 19, 1985·45 cites·4 claims
- 0372US4479145AApparatus for detecting the defect of patternNIPPON KOGAKU KK·Filed 1982·Granted Oct 23, 1984·44 cites·10 claims
- 0465US5912096ACharged-particle-beam exposure method with temperature-compensated exposure to offset expansion and contraction of substrateNIKON CORP·Filed 1998·Granted Jun 15, 1999·19 cites·4 claims
- 0555US6200710B1Methods for producing segmented reticlesNIKON CORP·Filed 1999·Granted Mar 13, 2001·16 cites·12 claims
- 0649US6156464AScanning-type charged-particle beam exposure methods including scan-velocity error detection and correctionNIKON CORP·Filed 1999·Granted Dec 5, 2000·9 cites·18 claims
- 0732US4472738APattern testing apparatusNIPPON KOGAKU KK·Filed 1982·Granted Sep 18, 1984·8 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →