Inventor · disambiguated record
Kaoru Hirata
Also filed as: HIRATA KAORU
64 granted patents·8 pending applications·395 citations·filing 2003–2024
98Inventor score
Top patents by PatentIndex Score
72 records- 0196US8181932B2Normally open type piezoelectric element driven metal diaphragm control valveMATSUMOTO ATSUSHI·Filed 2006·Granted May 22, 2012·33 cites·5 claims
- 0294US10648572B2Valve with built-in orifice, and pressure-type flow rate control deviceFUJIKIN KK·Filed 2017·Granted May 12, 2020·7 cites·11 claims
- 0394US9870006B2Pressure type flow control system with flow monitoringFUJIKIN KK·Filed 2016·Granted Jan 16, 2018·5 cites·4 claims
- 0494US9841770B2Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said deviceFUJIKIN KK·Filed 2015·Granted Dec 12, 2017·10 cites·13 claims
- 0594US9494947B2Pressure type flow control system with flow monitoringFUJIKIN KK·Filed 2013·Granted Nov 15, 2016·15 cites·6 claims
- 0693US8047510B2Evaporation supply apparatus for raw material and automatic pressure regulating device used therewithFUJIKIN KK·Filed 2007·Granted Nov 1, 2011·17 cites·8 claims
- 0792US8931506B2Gas supply apparatus equipped with vaporizerNAGATA ATSUSHI·Filed 2009·Granted Jan 13, 2015·20 cites·15 claims
- 0891US9163743B2Piezoelectrically driven valve and piezoelectrically driven flow rate control deviceHIDAKA ATSUSHI·Filed 2010·Granted Oct 20, 2015·19 cites·13 claims
- 0991US8555920B2Flow rate ratio variable type fluid supply apparatusHIRATA KAORU·Filed 2007·Granted Oct 15, 2013·41 cites·15 claims
- 1089US9010369B2Flow rate range variable type flow rate control apparatusFUJIKIN KK·Filed 2013·Granted Apr 21, 2015·8 cites·3 claims
- 1188US10883866B2Pressure-based flow rate control device and malfunction detection method thereforFUJIKIN KK·Filed 2016·Granted Jan 5, 2021·4 cites·9 claims
- 1288US8418714B2Flow rate range variable type flow rate control apparatusOHMI TADAHIRO·Filed 2006·Granted Apr 16, 2013·16 cites·4 claims
- 1388US8162286B2Piezoelectric driven control valveSAWADA YOHEI·Filed 2008·Granted Apr 24, 2012·17 cites·4 claims
- 1487US11054052B2Piezoelectric-element-driven valve and flow rate control deviceFUJIKIN KK·Filed 2017·Granted Jul 6, 2021·4 cites·8 claims
- 1587US10534376B2Gas divided flow supplying apparatus for semiconductor manufacturing equipmentFUJIKIN KK·Filed 2013·Granted Jan 14, 2020·10 cites·9 claims
- 1687US9383758B2Flow rate range variable type flow rate control apparatusFUJIKIN KK·Filed 2015·Granted Jul 5, 2016·4 cites·4 claims
- 1785US11079774B2Flow rate control deviceFUJIKIN KK·Filed 2018·Granted Aug 3, 2021·5 cites·12 claims
- 1885US9631777B2Raw material vaporizing and supplying apparatus equipped with raw material concentrationNAGASE MASAAKI·Filed 2012·Granted Apr 25, 2017·4 cites·16 claims
- 1984US9556518B2Raw material gas supply apparatus for semiconductor manufacturing equipmentFUJIKIN KK·Filed 2014·Granted Jan 31, 2017·6 cites·7 claims
- 2084US9133951B2Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employedOHMI TADAHIRO·Filed 2006·Granted Sep 15, 2015·14 cites·11 claims
- 2183US9632511B2Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the sameFUJIKIN KK·Filed 2013·Granted Apr 25, 2017·7 cites·11 claims
- 2283US8191856B2Piezoelectric element driven metal diaphragm control valveMATSUMOTO ATSUSHI·Filed 2010·Granted Jun 5, 2012·5 cites·7 claims
- 2382US12334355B2Pressure control deviceFUJIKIN KK·Filed 2020·Granted Jun 17, 2025·1 cites·6 claims
- 2482US10838435B2Pressure-type flow rate control deviceFUJIKIN KK·Filed 2017·Granted Nov 17, 2020·4 cites·4 claims
- 2582US10386861B2Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the sameFUJIKIN KK·Filed 2017·Granted Aug 20, 2019·3 cites·5 claims
- 2682US7654137B2Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employedFUJIKIN KK·Filed 2005·Granted Feb 2, 2010·13 cites·11 claims
- 2781US11346457B2Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply deviceFUJIKIN KK·Filed 2021·Granted May 31, 2022·1 cites·10 claims
- 2881US7945414B2Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensorFUJIKIN KK·Filed 2006·Granted May 17, 2011·16 cites·12 claims
- 2980US12007797B2Flow rate control device and flow rate control methodFUJIKIN KK·Filed 2023·Granted Jun 11, 2024·0 cites·7 claims
- 3080US10372145B2Pressure-type flow rate control deviceFUJIKIN KK·Filed 2014·Granted Aug 6, 2019·4 cites·10 claims
- 3180US8757197B2Automatic pressure regulator for flow rate regulatorHIRATA KAORU·Filed 2009·Granted Jun 24, 2014·16 cites·7 claims
- 3279US11914407B2Flow rate control deviceFUJIKIN KK·Filed 2020·Granted Feb 27, 2024·1 cites·2 claims
- 3378US10884436B2Flow rate signal correction method and flow rate control device employing sameFUJIKIN KK·Filed 2016·Granted Jan 5, 2021·2 cites·7 claims
- 3476US10174858B2Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valveFUJIKIN KK·Filed 2015·Granted Jan 8, 2019·3 cites·17 claims
- 3575US11269362B2Flow rate control method and flow rate control deviceFUJIKIN KK·Filed 2019·Granted Mar 8, 2022·2 cites·17 claims
- 3673US10386863B2Pressure-type flow controllerFUJIKIN KK·Filed 2014·Granted Aug 20, 2019·3 cites·13 claims
- 3771US9921089B2Flow rate range variable type flow rate control apparatusFUJIKIN KK·Filed 2016·Granted Mar 20, 2018·2 cites·4 claims
- 3871US8601976B2Gas supply system for semiconductor manufacturing facilitiesNISHINO KOUJI·Filed 2008·Granted Dec 10, 2013·11 cites·4 claims
- 3971US6938489B2Oscillatory type pressure sensorFUJIKIN KK·Filed 2003·Granted Sep 6, 2005·14 cites·14 claims
- 4070US12174647B2Flow rate control deviceFUJIKIN KK·Filed 2024·Granted Dec 24, 2024·0 cites·5 claims
- 4170US9746856B2Multi-hole orifice plate for flow control, and flow controller using the sameFUJIKIN KK·Filed 2014·Granted Aug 29, 2017·2 cites·12 claims
- 4269US11226641B2Fluid control deviceFUJIKIN KK·Filed 2017·Granted Jan 18, 2022·1 cites·11 claims
- 4369US10274356B2Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using containerFUJIKIN KK·Filed 2015·Granted Apr 30, 2019·1 cites·13 claims
- 4467US10641407B2Flow rate control deviceFUJIKIN KK·Filed 2017·Granted May 5, 2020·1 cites·20 claims
- 4567US10604840B2Liquid level indicator and liquid raw material vaporization feederFUJIKIN KK·Filed 2015·Granted Mar 31, 2020·1 cites·16 claims
- 4667US8587180B2Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis functionSUGITA KATSUYUKI·Filed 2009·Granted Nov 19, 2013·6 cites·20 claims
- 4763US12306647B2Flow rate control device and flow rate control method wherein an internal command signal is generated by a combination of first order lag process and ramp processFUJIKIN KK·Filed 2021·Granted May 20, 2025·0 cites·8 claims
- 4863US8606412B2Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatusNAGASE MASAAKI·Filed 2007·Granted Dec 10, 2013·5 cites·12 claims
- 4963US7363810B2Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device using the sameFUJIKIN KK·Filed 2004·Granted Apr 29, 2008·11 cites·16 claims
- 5061US12398819B2Controller and vaporization supply deviceFUJIKIN KK·Filed 2022·Granted Aug 26, 2025·0 cites·11 claims
Showing the top 50 of 72 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →