Inventor · disambiguated record
Kazunori Imamura
Also filed as: IMAMURA KAZUNORI
14 granted patents·852 citations·filing 1982–1989
95Inventor score
Top patents by PatentIndex Score
14 records- 0197US4889998AApparatus with four light detectors for checking surface of mask with pellicleNIKON CORP·Filed 1988·Granted Dec 26, 1989·117 cites·9 claims
- 0296US4966457AInspecting apparatus for determining presence and location of foreign particles on reticles or pelliclesNIKON CORP·Filed 1989·Granted Oct 30, 1990·122 cites·13 claims
- 0395US4833051AProtective device for photographic masksNIPPON KOGAKU KK·Filed 1987·Granted May 23, 1989·101 cites·8 claims
- 0495US4690528AProjection exposure apparatusNIPPON KOGAKU KK·Filed 1984·Granted Sep 1, 1987·101 cites·17 claims
- 0595US4468120AForeign substance inspecting apparatusNIPPON KOGAKU KK·Filed 1982·Granted Aug 28, 1984·107 cites·18 claims
- 0691US4999510AApparatus for detecting foreign particles on a surface of a reticle or pellicleNIKON CORP·Filed 1989·Granted Mar 12, 1991·70 cites·7 claims
- 0787US4610541AForeign substance inspecting apparatusNIPPON KOGAKU KK·Filed 1984·Granted Sep 9, 1986·43 cites·9 claims
- 0885US4715392AAutomatic photomask or reticle washing and cleaning systemNIPPON KOGAKU KK·Filed 1987·Granted Dec 29, 1987·67 cites·9 claims
- 0978US4803373AConveyor arm apparatus with gap detectionNIKON CORP·Filed 1987·Granted Feb 7, 1989·53 cites·32 claims
- 1071US5016586AApparatus for controlling a throttle valveHITACHI LTD·Filed 1989·Granted May 21, 1991·17 cites·9 claims
- 1168US4568835AApparatus for detecting foreign matters on a planar substrateNIPPON KOGAKU KK·Filed 1982·Granted Feb 4, 1986·24 cites·9 claims
- 1252US4776693AForeign substance inspecting system including a calibration standardNIPPON KOGAKU KK·Filed 1987·Granted Oct 11, 1988·15 cites·8 claims
- 1345US4666292AProjection optical apparatus and a photographic mask thereforNIPPON KOGAKU KK·Filed 1985·Granted May 19, 1987·7 cites·11 claims
- 1441US4908517AApparatus for examining the surface of a substrateNIKON CORP·Filed 1988·Granted Mar 13, 1990·8 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →