Inventor · disambiguated record
Kazumi Iwadate
Also filed as: IWADATE KAZUMI
4 granted patents·53 citations·filing 1985–1987
77Inventor score
Top patents by PatentIndex Score
4 records- 0176US4692579AElectron beam lithography apparatusHITACHI LTD·Filed 1985·Granted Sep 8, 1987·21 cites·7 claims
- 0263US4699870APatterning methodNIPPON TELEGRAPH & TELEPHONE·Filed 1985·Granted Oct 13, 1987·21 cites·14 claims
- 0351US4808829AMark position detection system for use in charged particle beam apparatusHITACHI LTD·Filed 1987·Granted Feb 28, 1989·8 cites·4 claims
- 0431US4820609AHighly sensitive positive resist mixtureNIPPON TELEGRAPH & TELEPHONE·Filed 1987·Granted Apr 11, 1989·3 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →