Inventor · disambiguated record
Kangmin Jeon
Also filed as: JEON KANGMIN
6 granted patents·5 pending applications·16 citations·filing 2015–2024
73Inventor score
Top patents by PatentIndex Score
11 records- 0194US10934621B2Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Mar 2, 2021·14 cites·12 claims
- 0264US9355857B2Substrate manufacturing method and substrate manufacturing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted May 31, 2016·1 cites·14 claims
- 0360US12494352B2Plasma confinement ring, semiconductor manufacturing apparatus including the same, and method of manufacturing a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Dec 9, 2025·0 cites·15 claims
- 0460US11384433B2Gas injection module, substrate processing apparatus, and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jul 12, 2022·0 cites·20 claims
- 0558US2025218752A1Substrate processing apparatus, substate processing method using the same, and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0657US2025239439A1Edge ring and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0755US9847266B2Method of fabricating semiconductor deviceKIM TAE-HWA·Filed 2016·Granted Dec 19, 2017·1 cites·11 claims
- 0853US2025239436A1Semiconductor wafer processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0948US2023143327A1Focus ring, substrate processing apparatus including the same, and substrate processing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 1045US2016203996A1Substrate manufacturing method and substrate manufacturing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2016·Application pending·0 cites
- 1143US11251022B2Gas supply assembly and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Feb 15, 2022·0 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →