Inventor · disambiguated record
Kaneo Kageyama
Also filed as: KAGEYAMA KANEO
4 granted patents·91 citations·filing 1996–2007
77Inventor score
Technology areasH01J
Top patents by PatentIndex Score
4 records- 0195US7598497B2Charged particle beam scanning method and charged particle beam apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted Oct 6, 2009·45 cites·11 claims
- 0275US5659174AScanning electron microscopeHITACHI LTD·Filed 1996·Granted Aug 19, 1997·40 cites·9 claims
- 0346US6693288B2Charged particle beam irradiation apparatus and irradiation method using the apparatusHITACHI LTD·Filed 2001·Granted Feb 17, 2004·1 cites·1 claims
- 0440US6323498B1Charged particle beam irradiation apparatus and irradiation method using the apparatusHITACHI LTD·Filed 1999·Granted Nov 27, 2001·5 cites·14 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →