Inventor · disambiguated record
Kam-Tung Li
Also filed as: LI KAM-TUNG
4 granted patents·35 citations·filing 1998–2002
75Inventor score
Files withMOSEL VITELIC INC4
Top patents by PatentIndex Score
4 records- 0164US6342426B1Method for protecting stepper alignment marksMOSEL VITELIC INC·Filed 2001·Granted Jan 29, 2002·15 cites·5 claims
- 0259US6228661B1Method to determine the dark-to-clear exposure dose for the swing curveMOSEL VITELIC INC·Filed 2000·Granted May 8, 2001·7 cites·8 claims
- 0345US6756168B2Determining exposure time of wafer photolithography processMOSEL VITELIC INC·Filed 2002·Granted Jun 29, 2004·5 cites·20 claims
- 0438US6190928B1Method for actually measuring misalignment of viaMOSEL VITELIC INC·Filed 1998·Granted Feb 20, 2001·8 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →