Inventor · disambiguated record
Katsuji Matano
Also filed as: MATANO KATSUJI
0 granted patents·4 pending applications·0 citations·filing 2002–2007
Top patents by PatentIndex Score
4 records- 0144US2007215278A1Plasma etching apparatus and method for forming inner wall of plasma processing chamberFURUSE MUNEO·Filed 2006·Application pending·0 cites
- 0241US2007044914A1Vacuum processing apparatusMATANO KATSUJI·Filed 2005·Application pending·0 cites
- 0341US2008112780A1Vacuum processing apparatusMATANO KATSUJI·Filed 2007·Application pending·0 cites
- 0436US2002179245A1Plasma processing apparatus and maintenance method thereforFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →