Inventor · disambiguated record
Karl Paul Muller
Also filed as: MULLER KARL P · MULLER KARL PAUL · MULLER KARL PAUL LUDWIG
9 granted patents·495 citations·filing 1995–1998
92Inventor score
Top patents by PatentIndex Score
9 records- 0189US5667622AIn-situ wafer temperature control apparatus for single wafer toolsSIEMENS AG·Filed 1995·Granted Sep 16, 1997·121 cites·20 claims
- 0288US6150231AOverlay measurement technique using moire patternsSIEMENS AG·Filed 1998·Granted Nov 21, 2000·114 cites·5 claims
- 0385US6294026B1Distribution plate for a reaction chamber with multiple gas inlets and separate mass flow control loopsSIEMENS AG·Filed 1996·Granted Sep 25, 2001·73 cites·20 claims
- 0480US5605600AEtch profile shaping through wafer temperature controlIBM·Filed 1995·Granted Feb 25, 1997·61 cites·26 claims
- 0577US5724144AProcess monitoring and thickness measurement from the back side of a semiconductor bodyIBM·Filed 1996·Granted Mar 3, 1998·43 cites·36 claims
- 0668US5776808APad stack with a poly SI etch stop for TEOS mask removal with RIESIEMENS AG·Filed 1996·Granted Jul 7, 1998·37 cites·30 claims
- 0761US5665622AFolded trench and rie/deposition process for high-value capacitorsIBM·Filed 1995·Granted Sep 9, 1997·22 cites·25 claims
- 0849US5838045AFolded trench and RIE/deposition process for high-value capacitorsIBM·Filed 1997·Granted Nov 17, 1998·12 cites·11 claims
- 0945US5592412AEnhanced deep trench storage node capacitance for DRAMSIEMENS AG·Filed 1995·Granted Jan 7, 1997·12 cites·20 claims
Join the waitlist — get patent alerts
Get an alert when Karl Paul Muller files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →