Inventor · disambiguated record
Kanefumi Nakahara
Also filed as: NAKAHARA KANEFUMI
7 granted patents·2 pending applications·184 citations·filing 1994–2003
88Inventor score
Files withNIKON CORP9
Top patents by PatentIndex Score
9 records- 0181US6499935B1Photomask case, transporting apparatus, and transporting methodNIKON CORP·Filed 2000·Granted Dec 31, 2002·28 cites·8 claims
- 0277US5442163AExposure apparatusNIKON CORP·Filed 1994·Granted Aug 15, 1995·39 cites·12 claims
- 0370US5743409ACase for housing a substrateNIKON CORP·Filed 1996·Granted Apr 28, 1998·48 cites·4 claims
- 0459US5498118AApparatus for and method of carrying a substrateNIKON CORP·Filed 1995·Granted Mar 12, 1996·26 cites·8 claims
- 0554US6473157B2Method of manufacturing exposure apparatus and method for exposing a pattern on a mask onto a substrateNIKON CORP·Filed 1998·Granted Oct 29, 2002·20 cites·41 claims
- 0645US6048655AMethod of carrying and aligning a substrateNIKON CORP·Filed 1997·Granted Apr 11, 2000·13 cites·12 claims
- 0744US6184970B1Master plate transporting systemNIKON CORP·Filed 1997·Granted Feb 6, 2001·10 cites·12 claims
- 0836US2004017556A1Exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2003·Application pending·0 cites
- 0934US2002024647A1Exposure apparatus, lithography system and conveying method, and device manufacturing method and deviceNIKON CORP·Filed 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →