Inventor · disambiguated record
Kazumitsu Nakamura
Also filed as: NAKAMURA KAZUMITSU
9 granted patents·1 pending application·148 citations·filing 1981–2003
89Inventor score
Top patents by PatentIndex Score
10 records- 0182US5168166ACharged particle beam projection aligner having position detector using light beamHITACHI LTD·Filed 1991·Granted Dec 1, 1992·47 cites·18 claims
- 0267US5766967AMethod for fabricating a submicron T-shaped gateIND TECH RES INST·Filed 1996·Granted Jun 16, 1998·35 cites·18 claims
- 0360US5117111AElectron beam measuring apparatusHITACHI LTD·Filed 1991·Granted May 26, 1992·15 cites·9 claims
- 0458US4973849AElectron beam lithography apparatus having external magnetic field correcting deviceHITACHI LTD·Filed 1989·Granted Nov 27, 1990·13 cites·7 claims
- 0551US4433243AElectron beam exposure apparatusHITACHI LTD·Filed 1981·Granted Feb 21, 1984·16 cites·10 claims
- 0645US5384466AElectron beam lithography apparatus and a method thereofHITACHI LTD·Filed 1993·Granted Jan 24, 1995·7 cites·15 claims
- 0742US4853549AElectron beam drawing methodHITACHI LTD·Filed 1988·Granted Aug 1, 1989·5 cites·2 claims
- 0841US5130550AElectron beam lithography apparatus having device for correcting beam shapeHITACHI LTD·Filed 1990·Granted Jul 14, 1992·7 cites·7 claims
- 0937US2006211249A1Pattern transfer method and exposure systemJAPAN SCIENCE & TECH AGENCY·Filed 2003·Application pending·0 cites
- 1032US4777369AElectron beam lithographic methodHITACHI LTD·Filed 1986·Granted Oct 11, 1988·3 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →