Inventor · disambiguated record
Katsuhito Nishikawa
Also filed as: NISHIKAWA KATSUHITO
17 granted patents·2,030 citations·filing 1986–2007
96Inventor score
Top patents by PatentIndex Score
17 records- 0199US5444217ARapid thermal processing apparatus for processing semiconductor wafersMOORE EPITAXIAL INC·Filed 1993·Granted Aug 22, 1995·678 cites·73 claims
- 0296US6310327B1Rapid thermal processing apparatus for processing semiconductor wafersMOORE EPITAXIAL INC·Filed 2000·Granted Oct 30, 2001·82 cites·29 claims
- 0396US5683518ARapid thermal processing apparatus for processing semiconductor wafersMOORE EPITAXIAL INC·Filed 1994·Granted Nov 4, 1997·209 cites·51 claims
- 0495US5710407ARapid thermal processing apparatus for processing semiconductor wafersMOORE EPITAXIAL INC·Filed 1995·Granted Jan 20, 1998·140 cites·6 claims
- 0594US4770590AMethod and apparatus for transferring wafers between cassettes and a boatSILICON VALLEY GROUP·Filed 1986·Granted Sep 13, 1988·617 cites·21 claims
- 0692US6347749B1Semiconductor processing reactor controllable gas jet assemblyMOORE EPITAXIAL INC·Filed 2000·Granted Feb 19, 2002·40 cites·33 claims
- 0791US6328221B1Method for controlling a gas injector in a semiconductor processing reactorMOORE EPITAXIAL INC·Filed 2000·Granted Dec 11, 2001·43 cites·26 claims
- 0887US7794667B2Gas ring and method of processing substratesMOORE EPITAXIAL INC·Filed 2005·Granted Sep 14, 2010·12 cites·36 claims
- 0984US6592675B2Rotating susceptorMOORE EPITAXIAL INC·Filed 2001·Granted Jul 15, 2003·26 cites·27 claims
- 1079US6491435B1Linear robotMOORE EPITAXIAL INC·Filed 2000·Granted Dec 10, 2002·26 cites·26 claims
- 1179US6213478B1Holding mechanism for a susceptor in a substrate processing reactorMOORE EPITAXIAL INC·Filed 1999·Granted Apr 10, 2001·53 cites·20 claims
- 1277US6151447ARapid thermal processing apparatus for processing semiconductor wafersMOORE TECHNOLOGIES·Filed 1997·Granted Nov 21, 2000·40 cites·16 claims
- 1370US8610033B1Rapid thermal process reactor utilizing a low profile domeMOORE GARY M·Filed 2007·Granted Dec 17, 2013·5 cites·16 claims
- 1462US6443618B1Particulate free air bearing and sealMOORE EPITAXIAL INC·Filed 2000·Granted Sep 3, 2002·19 cites·20 claims
- 1557US6475284B1Gas dispersion headMOORE EPITAXIAL INC·Filed 1999·Granted Nov 5, 2002·18 cites·41 claims
- 1649US6428609B1Exhaust particulate controller and methodMOORE EPITAXIAL INC·Filed 2000·Granted Aug 6, 2002·8 cites·16 claims
- 1749US6163015ASubstrate support elementMOORE EPITAXIAL INC·Filed 1999·Granted Dec 19, 2000·14 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →