Inventor · disambiguated record
Katuya Oota
Also filed as: OOTA KATUYA
3 granted patents·42 citations·filing 1999–1999
69Inventor score
Files withMITSUBISHI ELECTRIC CORP3
Top patents by PatentIndex Score
3 records- 0161US6480755B1Process control device and process control method permitting processing order and processing condition to be changed while manufacturing process continuesMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Nov 12, 2002·34 cites·12 claims
- 0237US6463348B1Process control device and process control method enabling restoration of lot controlMITSUBISHI ELECTRIC CORP·Filed 1999·Granted Oct 8, 2002·5 cites·7 claims
- 0327US6397119B1Semiconductor manufacturing system for simultaneous processing of prescribed number of lotsMITSUBISHI ELECTRIC CORP·Filed 1999·Granted May 28, 2002·3 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →