Inventor · disambiguated record
Kazuaki Saiki
Also filed as: SAIKI KAZUAKI
16 granted patents·2 pending applications·505 citations·filing 1983–2012
95Inventor score
Files withNIKON CORP13NIPPON KOGAKU KK2FUJIMOTO HIROSHI1NAT UNIVERSITY CORP YOKOHAMA NAT UNIVERSITY1SAIKI KAZUAKI1
Top patents by PatentIndex Score
18 records- 0190US6008610APosition control apparatus for fine stages carried by a coarse stage on a high-precision scanning positioning systemNIKON CORP·Filed 1998·Granted Dec 28, 1999·79 cites·25 claims
- 0285US5715037AScanning exposure apparatusNIKON CORP·Filed 1996·Granted Feb 3, 1998·59 cites·17 claims
- 0381US5657130AExposure apparatus and methodNIKON CORP·Filed 1995·Granted Aug 12, 1997·49 cites·35 claims
- 0479US5920378AProjection exposure apparatusNIKON CORP·Filed 1997·Granted Jul 6, 1999·42 cites·20 claims
- 0578US6320345B1Command trajectory for driving a stage with minimal vibrationNIKON CORP·Filed 1998·Granted Nov 20, 2001·41 cites·34 claims
- 0678US5640227AExposure apparatus and exposure method for minimizing defocusing of the transferred patternNIKON CORP·Filed 1994·Granted Jun 17, 1997·32 cites·29 claims
- 0777US6084244AScanning exposure apparatus that compensates for positional deviation caused by substrate inclinationNIKON CORP·Filed 1998·Granted Jul 4, 2000·39 cites·29 claims
- 0875US5777722AScanning exposure apparatus and methodNIKON CORP·Filed 1996·Granted Jul 7, 1998·39 cites·34 claims
- 0974US9188878B2Driving system and driving method, exposure apparatus and exposure method, and driving system design methodFUJIMOTO HIROSHI·Filed 2012·Granted Nov 17, 2015·2 cites·36 claims
- 1074US4577141ASystem for driving a movable stageNIPPON KOGAKU KK·Filed 1984·Granted Mar 18, 1986·31 cites·10 claims
- 1172US4486078ADriving device for a revolver in a microscopeNIPPON KOGAKU KK·Filed 1983·Granted Dec 4, 1984·26 cites·8 claims
- 1267US8805556B2Damping apparatus and exposure apparatusSAIKI KAZUAKI·Filed 2009·Granted Aug 12, 2014·4 cites·18 claims
- 1365US6606146B2Stage device, exposure apparatus incorporating the stage device, and method of using the sameNIKON CORP·Filed 2001·Granted Aug 12, 2003·10 cites·49 claims
- 1464US6744511B1Stage device having drive mechanism for driving a movable stage, and exposure apparatus and method of detecting position of the stageNIKON CORP·Filed 1999·Granted Jun 1, 2004·28 cites·20 claims
- 1553US5798822AExposure apparatusNIKON CORP·Filed 1997·Granted Aug 25, 1998·14 cites·19 claims
- 1648US2010302526A1Drive control method for moving body, exposure method, robot control method, drive control apparatus, exposure apparatus and robot apparatusNIKON CORP·Filed 2009·Application pending·0 cites
- 1743US6509953B1Apparatus for exposing a pattern onto an object with controlled scanningNIKON CORP·Filed 1998·Granted Jan 21, 2003·10 cites·17 claims
- 1833US2011046795A1Drive control method, drive control apparatus, stage control method, stage control apparatus, exposure method, exposure apparatus and measuring apparatusNAT UNIVERSITY CORP YOKOHAMA NAT UNIVERSITY·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →