Inventor · disambiguated record
Kaoru Shinbara
Also filed as: SHINBARA KAORU
6 granted patents·767 citations·filing 1987–1998
89Inventor score
Technology areasH10P
Files withDAINIPPON SCREEN MFG6
Top patents by PatentIndex Score
6 records- 0194US4788994AWafer holding mechanismDAINIPPON SCREEN MFG·Filed 1987·Granted Dec 6, 1988·199 cites·20 claims
- 0293US5288333AWafer cleaning method and apparatus thereforeDAINIPPON SCREEN MFG·Filed 1992·Granted Feb 22, 1994·200 cites·12 claims
- 0387US6273104B1Method of and apparatus for processing substrateDAINIPPON SCREEN MFG·Filed 1996·Granted Aug 14, 2001·110 cites·31 claims
- 0487US5485644ASubstrate treating apparatusDAINIPPON SCREEN MFG·Filed 1994·Granted Jan 23, 1996·126 cites·22 claims
- 0583US5158100AWafer cleaning method and apparatus thereforDAINIPPON SCREEN MFG·Filed 1990·Granted Oct 27, 1992·87 cites·5 claims
- 0673US6155275ASubstrate processing unit and substrate processing apparatus using the sameDAINIPPON SCREEN MFG·Filed 1998·Granted Dec 5, 2000·45 cites·8 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →