Inventor · disambiguated record
Kayo Sugiyama
Also filed as: SUGIYAMA KAYO
3 granted patents·81 citations·filing 1997–1998
72Inventor score
Technology areasG03F
Files withNIKON CORP3
Top patents by PatentIndex Score
3 records- 0185US5867319AIllumination optical system, an exposure apparatus having the illumination system, and a method for manufacturing a semiconductor deviceNIKON CORP·Filed 1997·Granted Feb 2, 1999·64 cites·44 claims
- 0246US5963306AExposure apparatus and methods for using the sameNIKON CORP·Filed 1997·Granted Oct 5, 1999·11 cites·16 claims
- 0338US6106139AIllumination optical apparatus and semiconductor device manufacturing methodNIKON CORP·Filed 1998·Granted Aug 22, 2000·6 cites·31 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →