Inventor · disambiguated record
Kazuhisa Takao
Also filed as: TAKAO KAZUHISA
2 granted patents·1 pending application·21 citations·filing 1992–2006
58Inventor score
Files withTOKYO OHKA KOGYO CO LTD3
Top patents by PatentIndex Score
3 records- 0166US7815813B2End point detection method, end point detection device, and gas phase reaction processing apparatus equipped with end point detection deviceTOKYO OHKA KOGYO CO LTD·Filed 2006·Granted Oct 19, 2010·3 cites·15 claims
- 0256US5344536AMethod of and apparatus for processing a workpiece in plasmaTOKYO OHKA KOGYO CO LTD·Filed 1992·Granted Sep 6, 1994·18 cites·20 claims
- 0339US2007048200A1Gas phase reaction processing deviceTOKYO OHKA KOGYO CO LTD·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →