Inventor · disambiguated record
Kazutaka Taki
Also filed as: TAKI KAZUTAKA
5 granted patents·76 citations·filing 1990–1994
81Inventor score
Top patents by PatentIndex Score
5 records- 0177US5329130ACharged particle beam exposure method and apparatusFUJITSU LTD·Filed 1992·Granted Jul 12, 1994·33 cites·12 claims
- 0258US5134300AMethod and apparatus for controlling charged particle beams in charged particle beam exposure systemFUJITSU LTD·Filed 1991·Granted Jul 28, 1992·14 cites·9 claims
- 0355US5225684ACharged particle beam exposure apparatus control system and a method of operation for providing a drawing start signalFUJITSU LTD·Filed 1992·Granted Jul 6, 1993·12 cites·9 claims
- 0449US5093025ACholesteric liquid crystal polyester containing optically active groupTOSOH CORP·Filed 1990·Granted Mar 3, 1992·11 cites·1 claims
- 0542US5434795AMethod of forming pattern having optical angle in charged particle exposure systemFUJITSU LTD·Filed 1994·Granted Jul 18, 1995·6 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →