Inventor · disambiguated record
Kazunori Tsujimoto
Also filed as: TSUJIMOTO KAZUNORI
30 granted patents·2 pending applications·2,743 citations·filing 1987–2005
98Inventor score
Top patents by PatentIndex Score
32 records- 0199US4985114ADry etching by alternately etching and depositingHITACHI LTD·Filed 1989·Granted Jan 15, 1991·601 cites·8 claims
- 0299US4857137AProcess for surface treatmentHITACHI LTD·Filed 1987·Granted Aug 15, 1989·520 cites·17 claims
- 0398US5242539APlasma treatment method and apparatusHITACHI LTD·Filed 1992·Granted Sep 7, 1993·602 cites·76 claims
- 0497US4992136ADry etching methodHITACHI LTD·Filed 1988·Granted Feb 12, 1991·259 cites·9 claims
- 0592US5368685ADry etching apparatus and methodHITACHI LTD·Filed 1993·Granted Nov 29, 1994·148 cites·21 claims
- 0691US5891252APlasma processing apparatusHITACHI LTD·Filed 1996·Granted Apr 6, 1999·60 cites·30 claims
- 0786US6033481APlasma processing apparatusHITACHI LTD·Filed 1999·Granted Mar 7, 2000·41 cites·23 claims
- 0875US6562722B2Method and apparatus for dry etchingHITACHI LTD·Filed 2001·Granted May 13, 2003·11 cites·9 claims
- 0975US6332425B1Surface treatment method and systemHITACHI LTD·Filed 2000·Granted Dec 25, 2001·16 cites·15 claims
- 1075US5354416ADry etching methodOKUDAIRA SADAYUKI·Filed 1990·Granted Oct 11, 1994·67 cites·26 claims
- 1175US4911812APlasma treating method and apparatus thereforHITACHI LTD·Filed 1988·Granted Mar 27, 1990·47 cites·16 claims
- 1274US5474650AMethod and apparatus for dry etchingHITACHI LTD·Filed 1994·Granted Dec 12, 1995·39 cites·14 claims
- 1374US4956043ADry etching apparatusHITACHI LTD·Filed 1988·Granted Sep 11, 1990·46 cites·22 claims
- 1474US4943344AEtching methodHITACHI LTD·Filed 1989·Granted Jul 24, 1990·41 cites·7 claims
- 1572US4986877AMethod of dry etchingHITACHI LTD·Filed 1988·Granted Jan 22, 1991·37 cites·16 claims
- 1671US6231777B1Surface treatment method and systemHITACHI LTD·Filed 1995·Granted May 15, 2001·34 cites·6 claims
- 1769US6713401B2Method for manufacturing semiconductor deviceHITACHI LTD·Filed 2001·Granted Mar 30, 2004·12 cites·14 claims
- 1867US6136721AMethod and apparatus for dry etchingHITACHI LTD·Filed 2000·Granted Oct 24, 2000·7 cites·18 claims
- 1967US5270232AProcess for fabricating field effect transistorHITACHI LTD·Filed 1992·Granted Dec 14, 1993·27 cites·6 claims
- 2065US6333273B1Method and apparatus for dry etchingHITACHI LTD·Filed 2000·Granted Dec 25, 2001·6 cites·18 claims
- 2160US5147500ADry etching methodHITACHI LTD·Filed 1990·Granted Sep 15, 1992·32 cites·16 claims
- 2256US5643473ADry etching methodHITACHI LTD·Filed 1995·Granted Jul 1, 1997·21 cites·11 claims
- 2353US5318667AMethod and apparatus for dry etchingHITACHI LTD·Filed 1993·Granted Jun 7, 1994·18 cites·4 claims
- 2449US2006096706A1Dry etching apparatus and a method of manufacturing a semiconductor deviceHITACHI LTD·Filed 2005·Application pending·0 cites
- 2546US5705029ADry etching methodHITACHI LTD·Filed 1995·Granted Jan 6, 1998·13 cites·8 claims
- 2644US7071114B2Method and apparatus for dry etchingHITACHI LTD·Filed 2003·Granted Jul 4, 2006·0 cites·4 claims
- 2743US6008133AMethod and apparatus for dry etchingHITACHI LTD·Filed 1998·Granted Dec 28, 1999·6 cites·8 claims
- 2843US5409562ADry-etching method and apparatusHITACHI LTD·Filed 1992·Granted Apr 25, 1995·13 cites·30 claims
- 2941US5650038AMethod for dry etchingHITACHI LTD·Filed 1995·Granted Jul 22, 1997·6 cites·4 claims
- 3039US5795832AMethod and apparatus for dry etchingHITACHI LTD·Filed 1997·Granted Aug 18, 1998·5 cites·5 claims
- 3139US5354418AMethod for dry etchingHITACHI LTD·Filed 1994·Granted Oct 11, 1994·8 cites·12 claims
- 3230US2002084034A1Dry etching apparatus and a method of manufacturing a semiconductor deviceFiled 1999·Application pending·0 cites
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