Inventor · disambiguated record
Kazunori Tsutsuguchi
Also filed as: TSUTSUGUCHI KAZUNORI
2 granted patents·1 pending application·589 citations·filing 1996–2019
64Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0195US6194037B1Method of plasma processing a substrate placed on a substrate tableKOKUSAI ELECTRIC CO LTD·Filed 1996·Granted Feb 27, 2001·589 cites·22 claims
- 0234US11521880B2Substrate processing apparatus and recording medium for changing atmosphere of transfer chamberKOKUSAI ELECTRIC CORP·Filed 2019·Granted Dec 6, 2022·0 cites·13 claims
- 0331US2001035124A1Substrate processing apparatus and semiconductor manufacturing methodFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →