Inventor · disambiguated record

Kazuhiko Urano

Also filed as: URANO KAZUHIKO

2 granted patents·54 citations·filing 1994–1994

65Inventor score

Technology areasC23C H10P

Files withSHINETSU CHEMICAL CO2

Top patents by PatentIndex Score

2 records

0160US5532063ASilicon oxide depositing source and coated filmSHINETSU CHEMICAL CO·Filed 1994·Granted Jul 2, 1996·23 cites·2 claims
0259US5566043ACeramic electrostatic chuck with built-in heaterSHINETSU CHEMICAL CO·Filed 1994·Granted Oct 15, 1996·31 cites·10 claims

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