Inventor · disambiguated record
Kazufumi Yachi
Also filed as: YACHI Kazufumi
1 granted patent·2 pending applications·0 citations·filing 2020–2022
3Inventor score
Technology areasH01J
Files withHITACHI HIGH TECH CORP3
Top patents by PatentIndex Score
3 records- 0143US12512294B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2020·Granted Dec 30, 2025·0 cites·10 claims
- 0243US2025232946A1Charged particle beam device, and measurement methodHITACHI HIGH TECH CORP·Filed 2022·Application pending·0 cites
- 0342US2025046569A1Inspection device and film quality inspection methodHITACHI HIGH TECH CORP·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →