Inventor · disambiguated record
Katsushi Yagi
Also filed as: YAGI KATSUSHI
1 granted patent·2 pending applications·2 citations·filing 2007–2016
20Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0173US10090160B2Dry etching apparatus and methodHITACHI HIGH TECH CORP·Filed 2016·Granted Oct 2, 2018·2 cites·3 claims
- 0243US2013228550A1Dry etching apparatus and methodMORI MASAHITO·Filed 2012·Application pending·0 cites
- 0338US2009020227A1Vacuum processing apparatus for semiconductor fabrication apparatusANDOU YOUJI·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →