Inventor · disambiguated record
Kang Heum Yeon
Also filed as: YEON KANG H · YEON KANG HEUM
2 granted patents·1 pending application·1 citations·filing 2004–2016
29Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0153US9892942B2Substrate processing apparatusNPS CORP·Filed 2014·Granted Feb 13, 2018·1 cites·7 claims
- 0228US2007032090A1Plasma rapid thermal process apparatus in which supply part of radical source is improvedKORNIC SYSTEMS CORP·Filed 2004·Application pending·0 cites
- 0326US10643868B2Apparatus for processing substrateNPS CORP·Filed 2016·Granted May 5, 2020·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →