Inventor · disambiguated record
Kaveh Zarkar
Also filed as: ZARKAR KAVEH · ZARKAR KAVEH H
12 granted patents·335 citations·filing 2003–2014
93Inventor score
Top patents by PatentIndex Score
12 records- 0197US7891228B2Dual-mode mass flow verification and mass flow delivery system and methodMKS INSTR INC·Filed 2008·Granted Feb 22, 2011·56 cites·14 claims
- 0297US7474968B2Critical flow based mass flow verifierMKS INSTR INC·Filed 2006·Granted Jan 6, 2009·59 cites·14 claims
- 0395US7461549B1Mass flow verifiers capable of providing different volumes, and related methodsMKS INSTR INC·Filed 2007·Granted Dec 9, 2008·37 cites·18 claims
- 0492US8793082B2Upstream volume mass flow verification systems and methodsDING JUNHUA·Filed 2009·Granted Jul 29, 2014·24 cites·11 claims
- 0590US7673645B2Gas delivery method and system including a flow ratio controller using a multiple antisymmetric optimal control arrangementMKS INSTR INC·Filed 2007·Granted Mar 9, 2010·31 cites·14 claims
- 0689US7757554B2High accuracy mass flow verifier with multiple inletsMKS INSTR INC·Filed 2008·Granted Jul 20, 2010·20 cites·22 claims
- 0788US7467027B2Compensation for thermal siphoning in mass flow controllersMKS INSTR INC·Filed 2006·Granted Dec 16, 2008·29 cites·16 claims
- 0885US7706925B2Integrated pressure and flow ratio control systemMKS INSTR INC·Filed 2007·Granted Apr 27, 2010·23 cites·22 claims
- 0985US6955072B2System and method for in-situ flow verification and calibrationMKS INSTR INC·Filed 2003·Granted Oct 18, 2005·33 cites·20 claims
- 1080US9952078B2Upstream volume mass flow verification systems and methodsMKS INSTR INC·Filed 2014·Granted Apr 24, 2018·4 cites·12 claims
- 1173US7621290B2Gas delivery method and system including a flow ratio controller using antisymmetric optimal controlMKS INSTR INC·Filed 2005·Granted Nov 24, 2009·10 cites·15 claims
- 1271US7296465B2Vertical mount mass flow sensorMKS INSTR INC·Filed 2005·Granted Nov 20, 2007·9 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →