Inventor · disambiguated record
Kenji Aikawa
Also filed as: AIKAWA KENJI
20 granted patents·7 pending applications·33 citations·filing 2014–2023
91Inventor score
Files withFUJIKIN KK27
Top patents by PatentIndex Score
27 records- 0196US11427911B2Valve device, fluid control device and semiconductor manufacturing apparatus using the valve deviceFUJIKIN KK·Filed 2018·Granted Aug 30, 2022·9 cites·5 claims
- 0290US11231026B2Valve deviceFUJIKIN KK·Filed 2018·Granted Jan 25, 2022·5 cites·12 claims
- 0385US10830367B2Fluid control systemFUJIKIN KK·Filed 2017·Granted Nov 10, 2020·4 cites·13 claims
- 0483US11365830B2Valve device, fluid control device and semiconductor manufacturing apparatus using the valve deviceFUJIKIN KK·Filed 2018·Granted Jun 21, 2022·3 cites·7 claims
- 0583US11162597B2Flow path assembly and valve deviceFUJIKIN KK·Filed 2018·Granted Nov 2, 2021·3 cites·7 claims
- 0681US11243549B2Valve and fluid supply lineFUJIKIN KK·Filed 2018·Granted Feb 8, 2022·3 cites·7 claims
- 0776US11346505B2Fluid supply system, fluid control device, and semiconductor manufacturing deviceFUJIKIN KK·Filed 2019·Granted May 31, 2022·2 cites·12 claims
- 0874US12123517B2Valve, abnormality diagnosis method of valveFUJIKIN KK·Filed 2023·Granted Oct 22, 2024·0 cites·3 claims
- 0972US11774000B2Fluid control device and manufacturing method for the fluid control deviceFUJIKIN KK·Filed 2019·Granted Oct 3, 2023·1 cites·6 claims
- 1070US11506290B2Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing methodFUJIKIN KK·Filed 2018·Granted Nov 22, 2022·1 cites·4 claims
- 1161US10125803B2Fixing device for lower level member and fluid control apparatus provided with the sameFUJIKIN KK·Filed 2015·Granted Nov 13, 2018·1 cites·5 claims
- 1261US9810252B2Lower member fixing device and fluid control device provided with the sameFUJIKIN KK·Filed 2014·Granted Nov 7, 2017·1 cites·8 claims
- 1361US2020393060A1Valve, Abnormality Diagnosis Method of Valve, and Computer ProgramFUJIKIN KK·Filed 2018·Application pending·0 cites
- 1458US11879560B2Flow-path forming block and fluid control device provided with flow-path forming blockFUJIKIN KK·Filed 2020·Granted Jan 23, 2024·0 cites·4 claims
- 1552US11255458B2Valve device and fluid control deviceFUJIKIN KK·Filed 2020·Granted Feb 22, 2022·0 cites·10 claims
- 1650US11397443B2Fluid control device and semiconductor manufacturing apparatusFUJIKIN KK·Filed 2020·Granted Jul 26, 2022·0 cites·13 claims
- 1749US11906062B2Fluid control device, joint block and manufacturing method for fluid control deviceFUJIKIN KK·Filed 2019·Granted Feb 20, 2024·0 cites·5 claims
- 1848US2021388919A1Valve device and gas supply systemsFUJIKIN KK·Filed 2019·Application pending·0 cites
- 1947US10962513B2Concentration detection method and pressure-type flow rate control deviceFUJIKIN KK·Filed 2017·Granted Mar 30, 2021·0 cites·8 claims
- 2045US2022186845A1Flow path assembly, valve device, fluid control device, semiconductor manufacturing apparatus and semiconductor manufacturing method using said flow path assemblyFUJIKIN KK·Filed 2020·Application pending·0 cites
- 2145US2020248310A1Joint block and manufacturing method thereofFUJIKIN KK·Filed 2018·Application pending·0 cites
- 2245US2021388914A1Valve device and gas supply systemFUJIKIN KK·Filed 2019·Application pending·0 cites
- 2344US2020149639A1Valve deviceFUJIKIN KK·Filed 2018·Application pending·0 cites
- 2443US11340636B2Abnormality diagnosis method of fluid supply lineFUJIKIN KK·Filed 2018·Granted May 24, 2022·0 cites·7 claims
- 2543US11156305B2Fluid control systemFUJIKIN KK·Filed 2017·Granted Oct 26, 2021·0 cites·6 claims
- 2643US2020285256A1Fluid supply line and motion analysis systemFUJIKIN KK·Filed 2018·Application pending·0 cites
- 2742US11320056B2Valve deviceFUJIKIN KK·Filed 2018·Granted May 3, 2022·0 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →