Inventor · disambiguated record
Kenichiro Aikawa
Also filed as: AIKAWA KENICHIRO
12 granted patents·3 pending applications·10 citations·filing 2013–2021
83Inventor score
Top patents by PatentIndex Score
15 records- 0192US11948825B2Wafer placement tableNGK INSULATORS LTD·Filed 2021·Granted Apr 2, 2024·2 cites·3 claims
- 0291US11610798B2Electrostatic chuck assembly, electrostatic chuck, and focus ringNGK INSULATORS LTD·Filed 2020·Granted Mar 21, 2023·3 cites·3 claims
- 0381US9202718B2Electrostatic chuckNGK INSULATORS LTD·Filed 2013·Granted Dec 1, 2015·3 cites·11 claims
- 0478US11282734B2Electrostatic chuck and method for manufacturing the sameNGK INSULATORS LTD·Filed 2019·Granted Mar 22, 2022·2 cites·8 claims
- 0560US12108499B2Ceramic heater with shaftNGK INSULATORS LTD·Filed 2021·Granted Oct 1, 2024·0 cites·4 claims
- 0660US12087613B2Wafer placement table and method of manufacturing the sameNGK INSULATORS LTD·Filed 2021·Granted Sep 10, 2024·0 cites·3 claims
- 0757US12284729B2Ceramic heater with shaftNGK INSULATORS LTD·Filed 2021·Granted Apr 22, 2025·0 cites·6 claims
- 0857US11951583B2Electrostatic chuck with high insulation performance and electrostatic attraction forceNGK INSULATORS LTD·Filed 2021·Granted Apr 9, 2024·0 cites·4 claims
- 0954US11837490B2Electrostatic chuck heaterNGK INSULATORS LTD·Filed 2021·Granted Dec 5, 2023·0 cites·8 claims
- 1054US9184081B2Electrostatic chuckNGK INSULATORS LTD·Filed 2013·Granted Nov 10, 2015·0 cites·17 claims
- 1153US12230526B2Electrostatic chuck heaterNGK INSULATORS LTD·Filed 2021·Granted Feb 18, 2025·0 cites·6 claims
- 1249US12027385B2Ceramic heaterNGK INSULATORS LTD·Filed 2021·Granted Jul 2, 2024·0 cites·8 claims
- 1349US2022030668A1Ceramic heater with shaftNGK INSULATORS LTD·Filed 2021·Application pending·0 cites
- 1449US2022030669A1Ceramic heater with shaftNGK INSULATORS LTD·Filed 2021·Application pending·0 cites
- 1541US2021127487A1Base material for printed circuit board and printed circuit boardSUMITOMO ELECTRIC INDUSTRIES·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →