Inventor · disambiguated record
Kenji Aiko
Also filed as: AIKO KENJI
22 granted patents·5 pending applications·84 citations·filing 1990–2021
94Inventor score
Top patents by PatentIndex Score
27 records- 0193US8319960B2Defect inspection systemAIKO KENJI·Filed 2010·Granted Nov 27, 2012·19 cites·12 claims
- 0291US7535561B2Defect inspecting apparatusHITACHI HIGH TECH CORP·Filed 2007·Granted May 19, 2009·14 cites·2 claims
- 0387US11079275B2Far-infrared spectroscopy deviceHITACHI HIGH TECH CORP·Filed 2015·Granted Aug 3, 2021·4 cites·10 claims
- 0482US10948347B2Far-infrared spectroscopy deviceHITACHI HIGH TECH CORP·Filed 2019·Granted Mar 16, 2021·1 cites·2 claims
- 0580US8723536B2Inspection apparatus, substrate mounting device and inspection methodMIYAZAKI YUSUKE·Filed 2011·Granted May 13, 2014·10 cites·17 claims
- 0677US11016023B1Far-infrared spectroscopic device and far-infrared spectroscopic methodHITACHI HIGH TECH CORP·Filed 2017·Granted May 25, 2021·2 cites·15 claims
- 0777US9164042B2Device for detecting foreign matter and method for detecting foreign matterAIKO KENJI·Filed 2012·Granted Oct 20, 2015·2 cites·21 claims
- 0876US7733475B2Defect inspecting apparatusHITACHI HIGH TECH CORP·Filed 2009·Granted Jun 8, 2010·3 cites·4 claims
- 0976US7672799B2Defect inspection apparatus and defect inspection methodHITACHI HIGH TECH CORP·Filed 2007·Granted Mar 2, 2010·11 cites·17 claims
- 1075US8804109B2Defect inspection systemHITACHI HIGH TECH CORP·Filed 2012·Granted Aug 12, 2014·2 cites·6 claims
- 1174US7733474B2Defect inspection systemHITACHI HIGH TECH CORP·Filed 2008·Granted Jun 8, 2010·3 cites·14 claims
- 1270US11644418B2Far-infrared light source and far-infrared spectrometerHITACHI HIGH TECH CORP·Filed 2021·Granted May 9, 2023·0 cites·15 claims
- 1370US11320309B2Far-infrared spectroscopy deviceHITACHI HIGH TECH CORP·Filed 2021·Granted May 3, 2022·0 cites·2 claims
- 1470US7847927B2Defect inspection method and defect inspection apparatusHITACHI HIGH TECH CORP·Filed 2008·Granted Dec 7, 2010·2 cites·7 claims
- 1566US10113959B2Terahertz wave generating device and spectroscopic device using sameHITACHI HIGH TECH CORP·Filed 2015·Granted Oct 30, 2018·1 cites·18 claims
- 1661US7953567B2Defect inspection apparatus and defect inspection methodHITACHI HIGH TECH CORP·Filed 2010·Granted May 31, 2011·2 cites·36 claims
- 1756US2020371023A1Far-Infrared Light Source and Far-Infrared SpectrometerHITACHI HIGH TECH CORP·Filed 2017·Application pending·0 cites
- 1852US12196670B2Far-infrared spectroscopy deviceHITACHI HIGH TECH CORP·Filed 2020·Granted Jan 14, 2025·0 cites·10 claims
- 1951US8134701B2Defect inspecting method and apparatusCHIKAMATSU SHUICHI·Filed 2010·Granted Mar 13, 2012·0 cites·5 claims
- 2050US11977026B2Far-infrared spectroscopy device and far-infrared spectroscopy methodHITACHI HIGH TECH CORP·Filed 2019·Granted May 7, 2024·0 cites·13 claims
- 2150US2025035547A1Far-Infrared Spectroscopic Device, and Far-Infrared Spectroscopic MethodHITACHI HIGH TECH CORP·Filed 2021·Application pending·0 cites
- 2247US8228496B2Defect inspection method and defect inspection apparatusCHIKAMATSU SHUICHI·Filed 2010·Granted Jul 24, 2012·0 cites·11 claims
- 2347US2011141463A1Defect inspection method, and defect inspection deviceCHIKAMATSU SHUICHI·Filed 2009·Application pending·0 cites
- 2446US8577119B2Wafer surface observing method and apparatusHIGASHI HIROSHI·Filed 2007·Granted Nov 5, 2013·0 cites·12 claims
- 2541US2012313650A1Inspection device and inspection methodKAWAGUCHI HIROSHI·Filed 2010·Application pending·0 cites
- 2637US5123742ALaser length measuring instrumentHITACHI ELECTR ENG·Filed 1990·Granted Jun 23, 1992·8 cites·11 claims
- 2729US2012144938A1Inspection device and methodINAGAKI KATSUYASU·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →