Inventor · disambiguated record
Kesayoshi Amano
Also filed as: AMANO KESAYOSHI
7 granted patents·532 citations·filing 1989–1998
90Inventor score
Files withNIKON CORP7
Top patents by PatentIndex Score
7 records- 0194US6040096AMask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatusNIKON CORP·Filed 1998·Granted Mar 21, 2000·120 cites·35 claims
- 0294US4999669ALevelling device in an exposure apparatusNIKON CORP·Filed 1989·Granted Mar 12, 1991·102 cites·11 claims
- 0392US5894056AMask substrate, projection exposure apparatus equipped with the mask substrate, and a pattern formation method utilizing the projection exposure apparatusNIKON CORP·Filed 1996·Granted Apr 13, 1999·91 cites·30 claims
- 0487US5194743ADevice for positioning circular semiconductor wafersNIKON CORP·Filed 1991·Granted Mar 16, 1993·118 cites·16 claims
- 0582US5510892AInclination detecting apparatus and methodNIKON CORP·Filed 1993·Granted Apr 23, 1996·42 cites·27 claims
- 0680US5361121APeriphery exposing method and apparatus thereforNIKON CORP·Filed 1991·Granted Nov 1, 1994·38 cites·4 claims
- 0767US5229811AApparatus for exposing peripheral portion of substrateNIKON CORP·Filed 1992·Granted Jul 20, 1993·21 cites·6 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →