Inventor · disambiguated record
Kei-Wei Chen
Also filed as: CHEN KEI-WEI
198 granted patents·65 pending applications·381 citations·filing 2001–2025
99Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD207TAIWAN SEMICONDUCTOR MFG29JANGJIAN SHIU-KO7CHANG SHIH-CHIEH5CHEN KEI-WEI3
Top patents by PatentIndex Score
263 records- 0198US11139432B1Methods of forming a FinFET deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 5, 2021·9 cites·20 claims
- 0298US9508556B1Method for fabricating fin field effect transistor and semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Nov 29, 2016·31 cites·20 claims
- 0397US10058974B1Method for controlling chemical mechanical polishing processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Aug 28, 2018·10 cites·20 claims
- 0496US11397078B2Thin film metrologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 26, 2022·4 cites·20 claims
- 0595US12131896B2Method for wafer backside polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Oct 29, 2024·2 cites·20 claims
- 0695US11761751B2Thin film metrologyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 19, 2023·2 cites·20 claims
- 0794US10201887B2Polishing pad having grooves on bottom surface of top layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Feb 12, 2019·10 cites·20 claims
- 0894US10164053B1Semiconductor device and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 25, 2018·18 cites·20 claims
- 0993US10504782B2Fin Field-Effect Transistor device and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 10, 2019·6 cites·20 claims
- 1093US7837841B2Apparatuses for electrochemical deposition, conductive layer, and fabrication methods thereofTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Nov 23, 2010·45 cites·9 claims
- 1192US11195931B2Gate structure, semiconductor device and the method of forming semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Dec 7, 2021·2 cites·20 claims
- 1291US11854901B2Semiconductor method and deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 26, 2023·1 cites·20 claims
- 1391US9947753B2Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 17, 2018·6 cites·15 claims
- 1490US11145751B2Semiconductor structure with doped contact plug and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 12, 2021·6 cites·20 claims
- 1589US9722081B1FinFET device and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Aug 1, 2017·4 cites·18 claims
- 1689US2025120171A1Manufacturing method of field effect transistor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1788US9806154B2FinFET structure and method for manufacturing thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Oct 31, 2017·4 cites·20 claims
- 1888US9064770B2Methods for minimizing edge peeling in the manufacturing of BSI chipsKUO CHUN-TING·Filed 2012·Granted Jun 23, 2015·10 cites·22 claims
- 1987US10714576B2Semiconductor device and method for manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 14, 2020·3 cites·20 claims
- 2087US10002867B2Fin-type field effect transistor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jun 19, 2018·3 cites·19 claims
- 2187US9368394B1Dry etching gas and method of manufacturing semiconductor deviceTAIWAN SEMICONDUCTOR MFG·Filed 2015·Granted Jun 14, 2016·6 cites·20 claims
- 2287US8247322B2Via/contact and damascene structures and manufacturing methods thereofCHANG SHIH-CHIEH·Filed 2007·Granted Aug 21, 2012·14 cites·16 claims
- 2387US2025366098A1Semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2486US11964358B2Chemical mechanical polishing apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 23, 2024·1 cites·20 claims
- 2586US11772228B2Chemical mechanical polishing apparatus including a multi-zone platenTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 3, 2023·2 cites·20 claims
- 2686US11679469B2Chemical mechanical planarization toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 20, 2023·2 cites·18 claims
- 2786US10643892B2Metal loss prevention using implantationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 5, 2020·3 cites·20 claims
- 2885US11211289B2Metal loss prevention using implantationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 28, 2021·2 cites·20 claims
- 2984US12464790B2Semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Nov 4, 2025·0 cites·20 claims
- 3084US12424449B2CMP system and method of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Sep 23, 2025·0 cites·20 claims
- 3184US12249542B2Semiconductor device structure with an interconnect structure in a dielectric layer with multiple hydrophobic layers along sidewalls of the dielectric layer, and method for forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Mar 11, 2025·0 cites·20 claims
- 3284US11482450B2Methods of forming an abrasive slurry and methods for chemical- mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Oct 25, 2022·1 cites·20 claims
- 3384US11024540B2Fin field-effect transistor device and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 1, 2021·2 cites·20 claims
- 3484US8890273B2Methods and apparatus for an improved reflectivity optical grid for image sensorsJANGJIAN SHIU-KO·Filed 2012·Granted Nov 18, 2014·3 cites·15 claims
- 3584US8772899B2Method and apparatus for backside illumination sensorJANGJIAN SHIU-KO·Filed 2012·Granted Jul 8, 2014·3 cites·20 claims
- 3684US8518819B2Semiconductor device contact structures and methods for making the sameCHANG SHIH CHIEH·Filed 2011·Granted Aug 27, 2013·5 cites·16 claims
- 3783US12311495B2Temperature control in chemical mechanical polishTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted May 27, 2025·0 cites·20 claims
- 3883US12172263B2Chemical mechanical planarization toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 24, 2024·0 cites·20 claims
- 3983US12068195B2Metal loss prevention using implantationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 20, 2024·0 cites·20 claims
- 4083US11069533B2CMP system and method of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 20, 2021·2 cites·20 claims
- 4183US10950710B2Fin-type field effect transistorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 16, 2021·2 cites·20 claims
- 4283US10937906B2Semiconductor device including fin structures and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 2, 2021·2 cites·19 claims
- 4383US9281475B2Resistive random-access memory (RRAM) with multi-layer device structureTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Mar 8, 2016·4 cites·20 claims
- 4482US11694889B2Chemical mechanical polishing cleaning system with temperature control for defect reductionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 4, 2023·2 cites·20 claims
- 4582US10276715B2Fin field effect transistor and method for fabricating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Apr 30, 2019·3 cites·18 claims
- 4682US2024339521A1Fin-type field effect transistorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4782US2025308928A1Chemical mechanical polishing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 4881US12507458B2Semiconductor device with dielectric spacer liner on source/drain contactTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 23, 2025·0 cites·20 claims
- 4981US12030159B2Chemical mechanical planarization toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 9, 2024·0 cites·20 claims
- 5081US11850704B2Methods to clean chemical mechanical polishing systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 26, 2023·0 cites·20 claims
Showing the top 50 of 263 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →