Inventor · disambiguated record
Kengo Ehara
Also filed as: EHARA Kengo
1 granted patent·5 pending applications·1 citations·filing 2019–2024
14Inventor score
Files withJSR CORP6
Top patents by PatentIndex Score
6 records- 0165US11243468B2Composition for resist underlayer film formation, resist underlayer film and formation method thereof, and patterned substrate production methodJSR CORP·Filed 2019·Granted Feb 8, 2022·1 cites·17 claims
- 0253US2024288773A1Method for manufacturing semiconductor substrate, and compositionJSR CORP·Filed 2024·Application pending·0 cites
- 0353US2025110407A1Semiconductor substrate manufacturing method, and resist base film forming compositionJSR CORP·Filed 2024·Application pending·0 cites
- 0452US2024255852A1Method for manufacturing semiconductor substrate and compositionJSR CORP·Filed 2024·Application pending·0 cites
- 0548US2023341778A1Method for manufacturing semiconductor substrate and compositionJSR CORP·Filed 2023·Application pending·0 cites
- 0646US2020348595A1Composition, film, and production method of patterned substrateJSR CORP·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →