Inventor · disambiguated record
Keiji Emoto
Also filed as: EMOTO KEIJI
52 granted patents·11 pending applications·580 citations·filing 1999–2024
98Inventor score
Top patents by PatentIndex Score
63 records- 0198US6226073B1Stage system with driving mechanism, and exposure apparatus having the sameCANON KK·Filed 1999·Granted May 1, 2001·128 cites·26 claims
- 0296US6810298B2Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing methodCANON KK·Filed 2001·Granted Oct 26, 2004·61 cites·25 claims
- 0395US7177007B2Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing methodCANON KK·Filed 2006·Granted Feb 13, 2007·19 cites·16 claims
- 0494US7282821B2Linear motor, stage apparatus, exposure apparatus, and device manufacturing apparatusCANON KK·Filed 2005·Granted Oct 16, 2007·22 cites·31 claims
- 0594US6552773B2Stage system with driving mechanism, and exposure apparatus having the sameCANON KK·Filed 2000·Granted Apr 22, 2003·50 cites·20 claims
- 0691US7218020B2Linear motor, stage apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2005·Granted May 15, 2007·17 cites·13 claims
- 0790US7282820B2Stage device and exposure apparatusCANON KK·Filed 2005·Granted Oct 16, 2007·10 cites·7 claims
- 0889US7057703B2Exposure apparatusCANON KK·Filed 2005·Granted Jun 6, 2006·11 cites·7 claims
- 0987US6954258B2Positioning apparatusCANON KK·Filed 2002·Granted Oct 11, 2005·27 cites·17 claims
- 1083US7292426B2Substrate holding system and exposure apparatus using the sameCANON KK·Filed 2004·Granted Nov 6, 2007·19 cites·41 claims
- 1183US7038759B2Exposure apparatusCANON KK·Filed 2002·Granted May 2, 2006·22 cites·9 claims
- 1282US11036149B2Imprint apparatus, method of operating the same, and method of manufacturing articleCANON KK·Filed 2018·Granted Jun 15, 2021·2 cites·33 claims
- 1382US10241424B2Imprint apparatus, imprint method, and article manufacturing methodCANON KK·Filed 2014·Granted Mar 26, 2019·3 cites·15 claims
- 1481US7158232B2Substrate processing apparatusCANON KK·Filed 2006·Granted Jan 2, 2007·10 cites·1 claims
- 1580US10303069B2Pattern forming method and method of manufacturing articleCANON KK·Filed 2015·Granted May 28, 2019·2 cites·30 claims
- 1680US7660098B2Substrate holding system and exposure apparatus using the sameCANON KK·Filed 2008·Granted Feb 9, 2010·4 cites·6 claims
- 1780US7518708B2Liquid-immersion exposure method and liquid-immersion exposure apparatusCANON KK·Filed 2007·Granted Apr 14, 2009·5 cites·23 claims
- 1880US7392718B2Sample temperature adjusting systemCANON KK·Filed 2005·Granted Jul 1, 2008·7 cites·10 claims
- 1980US7064804B2Temperature adjustment apparatus, exposure apparatus having the temperature adjustment apparatus, and semiconductor device manufacturing methodCANON KK·Filed 2003·Granted Jun 20, 2006·13 cites·2 claims
- 2080US6972499B2Linear motor, stage apparatus, exposure apparatus, and device manufacturing methodCANON KK·Filed 2002·Granted Dec 6, 2005·20 cites·11 claims
- 2179US7978304B2Processing apparatus for processing object in vesselCANON KK·Filed 2005·Granted Jul 12, 2011·4 cites·8 claims
- 2279US2025130505A1Exposure apparatus and method of manufacturing articleCANON KK·Filed 2024·Application pending·0 cites
- 2377US12216410B2Exposure apparatus and method of manufacturing articleCANON KK·Filed 2023·Granted Feb 4, 2025·0 cites·16 claims
- 2476US7982849B2Exposure apparatusCANON KK·Filed 2008·Granted Jul 19, 2011·4 cites·10 claims
- 2576US7733625B2Substrate holding system and exposure apparatus using the sameCANON KK·Filed 2008·Granted Jun 8, 2010·3 cites·5 claims
- 2676US7557469B2Positioning system and linear motorCANON KK·Filed 2006·Granted Jul 7, 2009·7 cites·12 claims
- 2776US7466531B2Substrate holding system and exposure apparatus using the sameCANON KK·Filed 2007·Granted Dec 16, 2008·3 cites·7 claims
- 2876US6915179B2Pipe structure, alignment apparatus, electron beam lithography apparatus, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factoryCANON KK·Filed 2001·Granted Jul 5, 2005·15 cites·10 claims
- 2975US7508646B2Substrate holding techniqueCANON KK·Filed 2004·Granted Mar 24, 2009·16 cites·14 claims
- 3074US8102500B2Stage device, exposure apparatus, and microdevice manufacturing methodSATO HITOSHI·Filed 2007·Granted Jan 24, 2012·3 cites·13 claims
- 3173US7388307B2Stage apparatus, plane motor, and device manufacturing methodCANON KK·Filed 2005·Granted Jun 17, 2008·3 cites·10 claims
- 3273US6879382B2Substrate processing apparatusCANON KK·Filed 2002·Granted Apr 12, 2005·12 cites·10 claims
- 3373US6836031B2Linear motor and exposure apparatus using the sameCANON KK·Filed 2001·Granted Dec 28, 2004·18 cites·12 claims
- 3472US10105892B2Imprint apparatus and imprint method, and article manufacturing methodCANON KK·Filed 2013·Granted Oct 23, 2018·2 cites·11 claims
- 3571US11762299B2Exposure apparatus and method of manufacturing articleCANON KK·Filed 2022·Granted Sep 19, 2023·0 cites·13 claims
- 3671US7705969B2Exposure apparatusCANON KK·Filed 2007·Granted Apr 27, 2010·4 cites·10 claims
- 3770US7154588B2Alignment apparatus and exposure apparatusCANON KK·Filed 2006·Granted Dec 26, 2006·2 cites·7 claims
- 3866US6791670B2Exposure apparatus, device manufacturing method, semiconductor manufacturing factory, and exposure apparatus maintenance methodCANON KK·Filed 2001·Granted Sep 14, 2004·14 cites·47 claims
- 3964US8956143B2Lithography system and lithography methodFURUMOTO MITSUHIRO·Filed 2011·Granted Feb 17, 2015·2 cites·12 claims
- 4063US9158211B2Exposure apparatus and method of manufacturing deviceEMOTO KEIJI·Filed 2011·Granted Oct 13, 2015·1 cites·11 claims
- 4160US7012690B2Substrate processing apparatusCANON KK·Filed 2004·Granted Mar 14, 2006·5 cites·10 claims
- 4260US6982782B2Processing apparatus for processing object in vesselCANON KK·Filed 2004·Granted Jan 3, 2006·4 cites·1 claims
- 4359US9104121B2Exposure apparatus having a vibration suppressing feature and method of manufacturing device using the exposure apparatusEMOTO KEIJI·Filed 2012·Granted Aug 11, 2015·1 cites·6 claims
- 4457US12326666B2Exposing apparatus and method for manufacturing articleCANON KK·Filed 2021·Granted Jun 10, 2025·0 cites·12 claims
- 4554US8891054B2Stage device including a heat insulating sheet supported by an auxiliary memberSATO HITOSHI·Filed 2011·Granted Nov 18, 2014·0 cites·7 claims
- 4652US7391496B2Exposure apparatusCANON KK·Filed 2005·Granted Jun 24, 2008·0 cites·3 claims
- 4750US9217937B2Interferometric measurement of rotation of stage apparatus and adjustment method thereof, exposure apparatus and method of manufacturing deviceCANON KK·Filed 2013·Granted Dec 22, 2015·0 cites·15 claims
- 4850US7284906B2Exhaust apparatus and control method for same, and vacuum-use hydrostatic bearingHITACHI HIGH TECH CORP·Filed 2003·Granted Oct 23, 2007·3 cites·13 claims
- 4949US10564541B2Pattern formation method and article manufacturing methodCANON KK·Filed 2017·Granted Feb 18, 2020·0 cites·14 claims
- 5049US7053982B2Alignment apparatus and exposure apparatusCANON KK·Filed 2004·Granted May 30, 2006·2 cites·13 claims
Showing the top 50 of 63 patent records by PatentIndex Score.
Join the waitlist — get patent alerts
Get an alert when Keiji Emoto files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →