Inventor · disambiguated record
Kerry S. Lahey
Also filed as: LAHEY KERRY S
2 granted patents·1 pending application·79 citations·filing 1997–2001
67Inventor score
Technology areasG01L
Files withMKS INSTR INC2
Top patents by PatentIndex Score
3 records- 0180US6772640B1Multi-temperature heater for use with pressure transducersMKS INSTR INC·Filed 2000·Granted Aug 10, 2004·30 cites·25 claims
- 0279US5942692ACapacitive pressure sensing method and apparatus avoiding interelectrode capacitance by driving with in-phase excitation signalsMKS INSTR INC·Filed 1997·Granted Aug 24, 1999·49 cites·46 claims
- 0325US2003121332A1Pressure transducer with dual slope outputFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →