Inventor · disambiguated record
Keith R. Pope
Also filed as: POPE KEITH · POPE KEITH R · POPE KEITH RANDAL
31 granted patents·2 pending applications·739 citations·filing 1990–2007
98Inventor score
Top patents by PatentIndex Score
33 records- 0192US6153043AElimination of photo-induced electrochemical dissolution in chemical mechanical polishingIBM·Filed 1998·Granted Nov 28, 2000·122 cites·20 claims
- 0290US6398875B1Process of drying semiconductor wafers using liquid or supercritical carbon dioxideIBM·Filed 2001·Granted Jun 4, 2002·53 cites·10 claims
- 0387US6251787B1Elimination of photo-induced electrochemical dissolution in chemical mechanical polishingIBM·Filed 2000·Granted Jun 26, 2001·38 cites·23 claims
- 0484US5007163ANon-destructure method of performing electrical burn-in testing of semiconductor chipsIBM·Filed 1990·Granted Apr 16, 1991·85 cites·6 claims
- 0580US6838015B2Liquid or supercritical carbon dioxide compositionIBM·Filed 2001·Granted Jan 4, 2005·20 cites·8 claims
- 0680US6736906B2Turbine part mount for supercritical fluid processorIBM·Filed 2002·Granted May 18, 2004·16 cites·28 claims
- 0780US6454869B1Process of cleaning semiconductor processing, handling and manufacturing equipmentIBM·Filed 2001·Granted Sep 24, 2002·24 cites·9 claims
- 0878US6200891B1Removal of dielectric oxidesIBM·Filed 1998·Granted Mar 13, 2001·54 cites·29 claims
- 0977US6683008B1Process of removing ion-implanted photoresist from a workpieceIBM·Filed 2002·Granted Jan 27, 2004·19 cites·14 claims
- 1076US6033996AProcess for removing etching residues, etching mask and silicon nitride and/or silicon dioxideIBM·Filed 1997·Granted Mar 7, 2000·48 cites·23 claims
- 1175US7288155B2Method for the rapid thermal control of a work piece in liquid or supercritical fluidIBM·Filed 2005·Granted Oct 30, 2007·3 cites·7 claims
- 1274US8828143B2Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluidSIMONS JOHN P·Filed 2007·Granted Sep 9, 2014·3 cites·12 claims
- 1374US6457480B1Process and apparatus for cleaning filtersIBM·Filed 2001·Granted Oct 1, 2002·9 cites·10 claims
- 1473US6823098B2Evanescent wave tunneling optical switch and networkIBM·Filed 2002·Granted Nov 23, 2004·14 cites·44 claims
- 1570US6927393B2Method of in situ monitoring of supercritical fluid process conditionsIBM·Filed 2002·Granted Aug 9, 2005·8 cites·12 claims
- 1667US5965465AEtching of silicon nitrideIBM·Filed 1997·Granted Oct 12, 1999·28 cites·17 claims
- 1765US6890855B2Process of removing residue material from a precision surfaceIBM·Filed 2001·Granted May 10, 2005·9 cites·20 claims
- 1865US6259712B1Interferometer method for providing stability of a laserIBM·Filed 1998·Granted Jul 10, 2001·28 cites·20 claims
- 1964US8388758B2Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluidSIMONS JOHN P·Filed 2007·Granted Mar 5, 2013·1 cites·4 claims
- 2064US6066267AEtching of silicon nitrideIBM·Filed 1999·Granted May 23, 2000·24 cites·10 claims
- 2163US7081208B2Method to build a microfilterIBM·Filed 2002·Granted Jul 25, 2006·9 cites·3 claims
- 2263US6739346B2Apparatus for cleaning filtersIBM·Filed 2002·Granted May 25, 2004·4 cites·4 claims
- 2361US6254796B1Selective etching of silicateIBM·Filed 1998·Granted Jul 3, 2001·24 cites·20 claims
- 2461US6150282ASelective removal of etching residuesIBM·Filed 1997·Granted Nov 21, 2000·25 cites·40 claims
- 2559US6653233B2Process of providing a semiconductor device with electrical interconnection capabilityIBM·Filed 2001·Granted Nov 25, 2003·6 cites·8 claims
- 2659US6117796ARemoval of silicon oxideIBM·Filed 1998·Granted Sep 12, 2000·23 cites·17 claims
- 2757US5986759AOptical interferometer measurement apparatus and methodIBM·Filed 1998·Granted Nov 16, 1999·19 cites·23 claims
- 2846US5935869AMethod of planarizing semiconductor wafersIBM·Filed 1997·Granted Aug 10, 1999·14 cites·8 claims
- 2944US7332436B2Process of removing residue from a precision surface using liquid or supercritical carbon dioxide compositionIBM·Filed 2004·Granted Feb 19, 2008·0 cites·14 claims
- 3043US6997197B2Apparatus and method for rapid thermal control of a workpiece in liquid or dense phase fluidIBM·Filed 2002·Granted Feb 14, 2006·0 cites·9 claims
- 3142US2005087490A1Process for removing impurities from low dielectric constant films disposed on semiconductor devicesIBM·Filed 2003·Application pending·0 cites
- 3239US5648268ARadionuclide exchange detection of ultra trace ionic impurities in waterIBM·Filed 1994·Granted Jul 15, 1997·9 cites·22 claims
- 3337US2003196679A1Process and apparatus for contacting a precision surface with liquid or supercritical carbon dioxideIBM·Filed 2002·Application pending·0 cites
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