Inventor · disambiguated record
Kenji Saitoh
Also filed as: SAITOH KENJI
79 granted patents·2,075 citations·filing 1986–2013
99Inventor score
Top patents by PatentIndex Score
79 records- 0195US5483343AWavelength compensator in a helium ambienceCANON KK·Filed 1994·Granted Jan 9, 1996·100 cites·13 claims
- 0295US5148036AMulti-axis wafer position detecting system using a mark having optical powerCANON KK·Filed 1992·Granted Sep 15, 1992·104 cites·46 claims
- 0394US5327221ADevice for detecting positional relationship between two objectsCANON KK·Filed 1992·Granted Jul 5, 1994·99 cites·15 claims
- 0494US5114236APosition detection method and apparatusCANON KK·Filed 1990·Granted May 19, 1992·92 cites·52 claims
- 0593US7901098B2Illuminating apparatus and image sensing system including illuminating apparatusCANON KK·Filed 2007·Granted Mar 8, 2011·20 cites·6 claims
- 0693US7107573B2Method for setting mask pattern and illumination conditionCANON KK·Filed 2002·Granted Sep 12, 2006·48 cites·19 claims
- 0793US4895914ASurface treated polymethylsilsesquioxane powderTOSHIBA SILICONE·Filed 1988·Granted Jan 23, 1990·47 cites·4 claims
- 0892US7075455B2Wireless communication apparatus and methodCANON KK·Filed 2003·Granted Jul 11, 2006·77 cites·4 claims
- 0991US7217503B2Exposure method and apparatusCANON KK·Filed 2002·Granted May 15, 2007·41 cites·19 claims
- 1091US6534242B2Multiple exposure device formationCANON KK·Filed 2001·Granted Mar 18, 2003·41 cites·104 claims
- 1191US5625453ASystem and method for detecting the relative positional deviation between diffraction gratings and for measuring the width of a line constituting a diffraction gratingCANON KK·Filed 1994·Granted Apr 29, 1997·93 cites·24 claims
- 1290US5333050AMeasuring method and apparatus for meausring the positional relationship of first and second gratingsCANON KK·Filed 1991·Granted Jul 26, 1994·71 cites·16 claims
- 1388US5891773ANon-volatile semiconductor storage apparatus and production thereofNEC CORP·Filed 1997·Granted Apr 6, 1999·61 cites·6 claims
- 1487US5721721ATwo scanning probes information recording/reproducing system with one probe to detect atomic reference location on a recording mediumCANON KK·Filed 1996·Granted Feb 24, 1998·120 cites·17 claims
- 1586US5369486APosition detector for detecting the position of an object using a diffraction grating positioned at an angleCANON KK·Filed 1992·Granted Nov 29, 1994·51 cites·7 claims
- 1684US5519686AEncoder for controlling measurements in the range of a few angstromsCANON KK·Filed 1995·Granted May 21, 1996·69 cites·34 claims
- 1784US4863832AOptical recording employing diacetylene compound and dye to change color and form pitsCANON KK·Filed 1986·Granted Sep 5, 1989·16 cites·20 claims
- 1882US8274646B2Measurement system and measurement processing methodOTA KAZUYUKI·Filed 2010·Granted Sep 25, 2012·6 cites·8 claims
- 1982US5610718AApparatus and method for detecting a relative displacement between first and second diffraction gratings arranged close to each other wherein said gratings have different pitch sizesCANON KK·Filed 1994·Granted Mar 11, 1997·40 cites·9 claims
- 2082US5524131AAlignment apparatus and SOR x-ray exposure apparatus having sameCANON KK·Filed 1995·Granted Jun 4, 1996·46 cites·20 claims
- 2181US7957636B2Illumination apparatus and appearance inspection apparatus including the sameCANON KK·Filed 2009·Granted Jun 7, 2011·6 cites·6 claims
- 2281US7605860B2Image pickup optical systemCANON KK·Filed 2007·Granted Oct 20, 2009·10 cites·6 claims
- 2380US7214453B2Mask and its manufacturing method, exposure, and device fabrication methodCANON KK·Filed 2004·Granted May 8, 2007·16 cites·10 claims
- 2480US5162656APosition detecting device employing marks and oblique projectionCANON KK·Filed 1992·Granted Nov 10, 1992·34 cites·22 claims
- 2577US5822389AAlignment apparatus and SOR X-ray exposure apparatus having sameCANON KK·Filed 1995·Granted Oct 13, 1998·36 cites·5 claims
- 2677US5200800APosition detecting method and apparatusCANON KK·Filed 1992·Granted Apr 6, 1993·30 cites·21 claims
- 2776US7965917B2Illuminating apparatus and surface inspection system using illuminating apparatusCANON KK·Filed 2007·Granted Jun 21, 2011·7 cites·4 claims
- 2875US6154281APosition detecting system and device manufacturing method using the sameCANON KK·Filed 1997·Granted Nov 28, 2000·36 cites·10 claims
- 2975US5751426APositional deviation measuring device and method for measuring the positional deviation between a plurality of diffraction gratings formed on the same objectCANON KK·Filed 1995·Granted May 12, 1998·37 cites·14 claims
- 3075US5682239AApparatus for detecting positional deviation of diffraction gratings on a substrate by utilizing optical heterodyne interference of light beams incident on the gratings from first and second light emittersCANON KK·Filed 1995·Granted Oct 28, 1997·37 cites·7 claims
- 3175US5585923AMethod and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting meansCANON KK·Filed 1994·Granted Dec 17, 1996·29 cites·7 claims
- 3274US6403291B1Multiple exposure methodCANON KK·Filed 1999·Granted Jun 11, 2002·33 cites·35 claims
- 3373US6842255B2Interferometer and interferance measurement methodCANON KK·Filed 2002·Granted Jan 11, 2005·17 cites·13 claims
- 3470US7402378B2Exposure method and apparatusCANON KK·Filed 2005·Granted Jul 22, 2008·2 cites·8 claims
- 3569US8437003B2Information processing apparatus and methodYOSHIKAWA HIROSHI·Filed 2009·Granted May 7, 2013·2 cites·8 claims
- 3669US6157452APosition detecting apparatusCANON KK·Filed 1996·Granted Dec 5, 2000·29 cites·10 claims
- 3769US4798740APolymerizable film and pattern forming method by use thereofCANON KK·Filed 1987·Granted Jan 17, 1989·18 cites·47 claims
- 3868US6839890B2Mask manufacturing methodCANON KK·Filed 2002·Granted Jan 4, 2005·9 cites·32 claims
- 3967US7277125B2Image processing system, method and program for image sensing using plural image sensing devices, wirelessly transmitting plural image data and processing the image dataCANON KABUSHKI KAISHA·Filed 2003·Granted Oct 2, 2007·8 cites·4 claims
- 4067US5313272AMethod and apparatus for measuring deviation between patterns on a semiconductor waferCANON KK·Filed 1992·Granted May 17, 1994·20 cites·8 claims
- 4167US5160848ADevice for detecting the relative position between opposed first and second objectsCANON KK·Filed 1992·Granted Nov 3, 1992·20 cites·21 claims
- 4266US7988309B2Corner cube member illumination device and inspection system having the sameCANON KK·Filed 2007·Granted Aug 2, 2011·1 cites·7 claims
- 4366US5294980APositioning detecting method and apparatusCANON KK·Filed 1993·Granted Mar 15, 1994·19 cites·110 claims
- 4465US5235408APosition detecting method and apparatusCANON KK·Filed 1992·Granted Aug 10, 1993·18 cites·32 claims
- 4564US5396335APosition detecting methodCANON KK·Filed 1991·Granted Mar 7, 1995·18 cites·12 claims
- 4664US5377009AAlignment methodCANON KK·Filed 1992·Granted Dec 27, 1994·19 cites·26 claims
- 4763US5325176APosition detecting method and apparatus including Fraunhofer diffraction detectorCANON KK·Filed 1992·Granted Jun 28, 1994·17 cites·40 claims
- 4862US9389067B2Three-dimensional shape measuring apparatus, three-dimensional shape measuring method, program, and storage mediumCANON KK·Filed 2013·Granted Jul 12, 2016·1 cites·13 claims
- 4962US8497995B2Measurement apparatus and method for measuring surface shape and roughnessOTA KAZUYUKI·Filed 2008·Granted Jul 30, 2013·4 cites·9 claims
- 5062US6221541B1Device manufacturing method and apparatus utilizing concentric fan-shaped pattern maskCANON KK·Filed 2000·Granted Apr 24, 2001·5 cites·28 claims
Showing the top 50 of 79 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →