Inventor · disambiguated record
Keisuke Shinagawa
Also filed as: SHINAGAWA KEISUKE
12 granted patents·1,219 citations·filing 1989–1997
94Inventor score
Files withFUJITSU LTD12
Top patents by PatentIndex Score
12 records- 0198US5961775AApparatus for removing organic resist from semiconductorFUJITSU LTD·Filed 1997·Granted Oct 5, 1999·483 cites·14 claims
- 0295US5478403AProcess and apparatus for ashing treatmentFUJITSU LTD·Filed 1994·Granted Dec 26, 1995·246 cites·14 claims
- 0388US5773201AMethod of stripping a resist maskFUJITSU LTD·Filed 1994·Granted Jun 30, 1998·49 cites·19 claims
- 0485US4961820AAshing method for removing an organic film on a substance of a semiconductor device under fabricationFUJITSU LTD·Filed 1989·Granted Oct 9, 1990·64 cites·7 claims
- 0582US5628871AMethod of removing resist mask and a method of manufacturing semiconductor deviceFUJITSU LTD·Filed 1994·Granted May 13, 1997·80 cites·18 claims
- 0678US5681780AManufacture of semiconductor device with ashing and etchingFUJITSU LTD·Filed 1995·Granted Oct 28, 1997·57 cites·21 claims
- 0778US5057187AAshing method for removing an organic film on a substance of a semiconductor device under fabricationFUJITSU LTD·Filed 1990·Granted Oct 15, 1991·61 cites·8 claims
- 0877US5832177AMethod for controlling apparatus for supplying steam for ashing processFUJITSU LTD·Filed 1995·Granted Nov 3, 1998·59 cites·4 claims
- 0976US4983254AProcessing for stripping organic materialFUJITSU LTD·Filed 1990·Granted Jan 8, 1991·62 cites·15 claims
- 1070US5397432AMethod for producing semiconductor integrated circuits and apparatus used in such methodFUJITSU LTD·Filed 1991·Granted Mar 14, 1995·53 cites·19 claims
- 1139US5998104AMethod of stripping a resist maskFUJITSU LTD·Filed 1997·Granted Dec 7, 1999·4 cites·45 claims
- 1228US6115538ASteam supplying apparatus and method for controlling sameFUJITSU LTD·Filed 1995·Granted Sep 5, 2000·1 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →