Inventor · disambiguated record
Kenji Shinma
Also filed as: SHINMA KENJI
9 granted patents·9 pending applications·68 citations·filing 2001–2020
85Inventor score
Top patents by PatentIndex Score
18 records- 0194US7268322B2Semiconductor heating apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Sep 11, 2007·30 cites·20 claims
- 0274US7361230B2Substrate processing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Apr 22, 2008·17 cites·23 claims
- 0368US10886157B2Wafer holding unitSUMITOMO ELECTRIC INDUSTRIES·Filed 2016·Granted Jan 5, 2021·1 cites·8 claims
- 0463US7279048B2Semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Granted Oct 9, 2007·8 cites·17 claims
- 0560US12033880B2Wafer holding bodySUMITOMO ELECTRIC INDUSTRIES·Filed 2020·Granted Jul 9, 2024·0 cites·20 claims
- 0660US6599034B2Sealed airtight container for optical-semiconductors and optical-semiconductors moduleSUMITOMO ELECTRIC INDUSTRIES·Filed 2001·Granted Jul 29, 2003·8 cites·13 claims
- 0752US6653604B2Heater member for mounting heating object and substrate processing apparatus using the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2002·Granted Nov 25, 2003·3 cites·19 claims
- 0851US7306858B2Aluminum nitride sintered bodySUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Granted Dec 11, 2007·0 cites·4 claims
- 0948US2005178334A1Susceptor Unit and Apparatus in Which the Susceptor Is InstalledSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Application pending·0 cites
- 1046US7342204B2Heater and heating deviceSUMITOMO ELECTRIC INDUSTRIES·Filed 2004·Granted Mar 11, 2008·1 cites·9 claims
- 1144US2009283034A1Wafer holder, manufacturing method thereof and semiconductor manufacturing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2007·Application pending·0 cites
- 1244US2007173185A1Wafer holder for semiconductor manufacturing device and semiconductor manufacturing device equipped with the sameSUMITOMO ELECTRIC INDUSTRIES·Filed 2007·Application pending·0 cites
- 1343US2008083732A1Wafer holder and exposure apparatus equipped with wafer holderSUMITOMO ELECTRIC INDUSTRIES·Filed 2006·Application pending·0 cites
- 1443US2007023320A1Wafer holder, heater unit having the wafer holder, and wafer prober having the heater unitITAKURA KATSUHIRA·Filed 2006·Application pending·0 cites
- 1542US2008211526A1Wafer holder, heater unit used for wafer prober and having wafer holder, and wafer proberSHINMA KENJI·Filed 2006·Application pending·0 cites
- 1641US2005263516A1Heating deviceSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Application pending·0 cites
- 1740US2005253285A1Supporting unit for semiconductor manufacturing device and semiconductor manufacturing device with supporting unit installedSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Application pending·0 cites
- 1840US2005160988A1Semiconductor-producing apparatusSUMITOMO ELECTRIC INDUSTRIES·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →