Inventor · disambiguated record
Kenichiro Shinoda
Also filed as: SHINODA KENICHIRO
5 granted patents·33 citations·filing 2002–2005
78Inventor score
Technology areasG03F
Files withCANON KK5
Top patents by PatentIndex Score
5 records- 0180US7092071B2Exposure apparatus and method, and device fabricating method using the sameCANON KK·Filed 2005·Granted Aug 15, 2006·6 cites·5 claims
- 0268US6868223B2Illumination apparatus, exposure apparatus using the same and device fabrication methodCANON KK·Filed 2002·Granted Mar 15, 2005·12 cites·19 claims
- 0365US7009681B2Exposure apparatus and method, and device fabricating method using the sameCANON KK·Filed 2003·Granted Mar 7, 2006·8 cites·13 claims
- 0455US6894764B2Illumination optical system, exposure apparatus having the same, and device fabricating methodCANON KK·Filed 2003·Granted May 17, 2005·5 cites·20 claims
- 0548US7130024B2Exposure apparatusCANON KK·Filed 2004·Granted Oct 31, 2006·2 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →