Inventor · disambiguated record
Kevin J. Torek
Also filed as: TOREK KEVIN · TOREK KEVIN J · TOREK KEVIN JAMES
72 granted patents·13 pending applications·2,229 citations·filing 1992–2025
99Inventor score
Top patents by PatentIndex Score
85 records- 0198US7030034B2Methods of etching silicon nitride substantially selectively relative to an oxide of aluminumMICRON TECHNOLOGY INC·Filed 2003·Granted Apr 18, 2006·234 cites·53 claims
- 0297US10714400B2Methods of forming semiconductor structures comprising thin film transistors including oxide semiconductorsMICRON TECHNOLOGY INC·Filed 2018·Granted Jul 14, 2020·11 cites·26 claims
- 0397US6372657B1Method for selective etching of oxidesMICRON TECHNOLOGY INC·Filed 2000·Granted Apr 16, 2002·188 cites·25 claims
- 0497US5439553AControlled etching of oxides via gas phase reactionsPENN STATE RES FOUND·Filed 1994·Granted Aug 8, 1995·338 cites·12 claims
- 0596US11488981B2Array of vertical transistors and method used in forming an array of vertical transistorsMICRON TECHNOLOGY INC·Filed 2020·Granted Nov 1, 2022·4 cites·22 claims
- 0696US7179717B2Methods of forming integrated circuit devicesMICRON TECHNOLOGY INC·Filed 2005·Granted Feb 20, 2007·39 cites·48 claims
- 0795US7378353B2High selectivity BPSG to TEOS etchantMICRON TECHNOLOGY INC·Filed 2005·Granted May 27, 2008·23 cites·13 claims
- 0895US5783495AMethod of wafer cleaning, and system and cleaning solution regarding sameMICRON TECHNOLOGY INC·Filed 1996·Granted Jul 21, 1998·173 cites·39 claims
- 0994US6517738B1Acid blend for removing etch residueMICRON TECHNOLOGY INC·Filed 2000·Granted Feb 11, 2003·55 cites·16 claims
- 1093US6562726B1Acid blend for removing etch residueMICRON TECHNOLOGY INC·Filed 1999·Granted May 13, 2003·117 cites·103 claims
- 1192US11276613B2Methods of forming semiconductor structures comprising thin film transistors including oxide semiconductorsMICRON TECHNOLOGY INC·Filed 2020·Granted Mar 15, 2022·2 cites·21 claims
- 1292US6783695B1Acid blend for removing etch residueMICRON TECHNOLOGY INC·Filed 2000·Granted Aug 31, 2004·52 cites·12 claims
- 1392US6235145B1System for wafer cleaningMICRON TECHNOLOGY INC·Filed 1998·Granted May 22, 2001·110 cites·6 claims
- 1491US8084845B2Subresolution silicon features and methods for forming the sameTOREK KEVIN J·Filed 2010·Granted Dec 27, 2011·12 cites·20 claims
- 1589US6589884B1Method of forming an inset in a tungsten silicide layer in a transistor gate stackMICRON TECHNOLOGY INC·Filed 2000·Granted Jul 8, 2003·46 cites·80 claims
- 1688US6645874B1Delivery of dissolved ozoneMICRON TECHNOLOGY INC·Filed 2001·Granted Nov 11, 2003·34 cites·23 claims
- 1788US6599683B1Photoresist developer with reduced resist toppling and method of using sameMICRON TECHNOLOGY INC·Filed 2002·Granted Jul 29, 2003·28 cites·45 claims
- 1887US6453914B2Acid blend for removing etch residueMICRON TECHNOLOGY INC·Filed 1999·Granted Sep 24, 2002·63 cites·67 claims
- 1987US5234540AProcess for etching oxide films in a sealed photochemical reactorSUBMICRON SYSTEMS INC·Filed 1992·Granted Aug 10, 1993·105 cites·1 claims
- 2086US8652926B1Methods of forming capacitorsLUGANI GURPREET·Filed 2012·Granted Feb 18, 2014·9 cites·14 claims
- 2186US6290863B1Method and apparatus for etch of a specific subarea of a semiconductor work objectMICRON TECHNOLOGY INC·Filed 1999·Granted Sep 18, 2001·79 cites·70 claims
- 2285US2024429104A1Devices comprising vertical transistors including a channel region comprising an oxide semiconductor materialMICRON TECHNOLOGY INC·Filed 2024·Application pending·0 cites
- 2384US9799658B2Methods of forming capacitorsMICRON TECHNOLOGY INC·Filed 2015·Granted Oct 24, 2017·3 cites·26 claims
- 2483US5990019ASelective etching of oxidesMICRON TECHNOLOGY INC·Filed 1997·Granted Nov 23, 1999·58 cites·31 claims
- 2581US5685951AMethods and etchants for etching oxides of silicon with low selectivity in a vapor phase systemMICRON TECHNOLOGY INC·Filed 1996·Granted Nov 11, 1997·53 cites·31 claims
- 2681US2025275249A1Array Of Vertical Transistors And Method Used In Forming An Array Of Vertical TransistorsMICRON TECHNOLOGY INC·Filed 2025·Application pending·0 cites
- 2780US12100629B2Methods of forming transistors and methods of forming devices comprising transistorsMICRON TECHNOLOGY INC·Filed 2022·Granted Sep 24, 2024·0 cites·20 claims
- 2880US6200909B1Method for selective etching of antireflective coatingsMICRON TECHNOLOGY INC·Filed 2000·Granted Mar 13, 2001·18 cites·43 claims
- 2980US6087273AProcess for selectively etching silicon nitride in the presence of silicon oxideMICRON TECHNOLOGY INC·Filed 1999·Granted Jul 11, 2000·49 cites·12 claims
- 3079US7678648B2Subresolution silicon features and methods for forming the sameMICRON TECHNOLOGY INC·Filed 2006·Granted Mar 16, 2010·6 cites·30 claims
- 3176US7667258B2Double-sided container capacitors using a sacrificial layerMICRON TECHNOLOGY INC·Filed 2007·Granted Feb 23, 2010·5 cites·17 claims
- 3275US9583381B2Methods for forming semiconductor devices and semiconductor device structuresMICRON TECHNOLOGY INC·Filed 2013·Granted Feb 28, 2017·3 cites·20 claims
- 3374US12336288B2Array of vertical transistors and method used in forming an array of vertical transistorsMICRON TECHNOLOGY INC·Filed 2022·Granted Jun 17, 2025·0 cites·19 claims
- 3474US9613864B2Low capacitance interconnect structures and associated systems and methodsMICRON TECHNOLOGY INC·Filed 2014·Granted Apr 4, 2017·3 cites·21 claims
- 3573US5885903AProcess for selectively etching silicon nitride in the presence of silicon oxideMICRON TECHNOLOGY INC·Filed 1997·Granted Mar 23, 1999·34 cites·10 claims
- 3672US6758938B1Delivery of dissolved ozoneMICRON TECHNOLOGY INC·Filed 1999·Granted Jul 6, 2004·30 cites·31 claims
- 3771US7977037B2Photoresist processing methodsMICRON TECHNOLOGY INC·Filed 2006·Granted Jul 12, 2011·3 cites·30 claims
- 3871US6194286B1Method of etching thermally grown oxide substantially selectively relative to deposited oxideMICRON TECHNOLOGY INC·Filed 2000·Granted Feb 27, 2001·11 cites·23 claims
- 3970US6232232B1High selectivity BPSG to TEOS etchantMICRON TECHNOLOGY INC·Filed 1998·Granted May 15, 2001·27 cites·16 claims
- 4069US6090683AMethod of etching thermally grown oxide substantially selectively relative to deposited oxideMICRON TECHNOLOGY INC·Filed 1997·Granted Jul 18, 2000·29 cites·43 claims
- 4169US5981401AMethod for selective etching of anitreflective coatingsMICRON TECHNOLOGY INC·Filed 1998·Granted Nov 9, 1999·27 cites·15 claims
- 4268US6740593B2Semiconductor processing methods utilizing low concentrations of reactive etching componentsMICRON TECHNOLOGY INC·Filed 2002·Granted May 25, 2004·9 cites·18 claims
- 4368US6709983B2Semiconductor processing methods utilizing low concentrations of reactive etching componentsMICRON TECHNOLOGY INC·Filed 2002·Granted Mar 23, 2004·9 cites·16 claims
- 4466US6541391B2Methods of cleaning surfaces of copper-containing materials, and methods of forming openings to copper-containing substratesMICRON TECHNOLOGY INC·Filed 2001·Granted Apr 1, 2003·13 cites·25 claims
- 4565US7329576B2Double-sided container capacitors using a sacrificial layerMICRON TECHNOLOGY INC·Filed 2004·Granted Feb 12, 2008·9 cites·38 claims
- 4665US7214978B2Semiconductor fabrication that includes surface tension controlMICRON TECHNOLOGY INC·Filed 2004·Granted May 8, 2007·6 cites·44 claims
- 4764US7541635B2Semiconductor fabrication using a collarMICRON TECHNOLOGY INC·Filed 2006·Granted Jun 2, 2009·2 cites·19 claims
- 4864US6103637AMethod for selective etching of antireflective coatingsMICRON TECHNOLOGY INC·Filed 1999·Granted Aug 15, 2000·21 cites·14 claims
- 4963US8981444B2Subresolution silicon features and methods for forming the sameTOREK KEVIN J·Filed 2011·Granted Mar 17, 2015·1 cites·20 claims
- 5063US8512587B2Highly selective doped oxide etchantRANA NIRAJ·Filed 2007·Granted Aug 20, 2013·1 cites·36 claims
Showing the top 50 of 85 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →