Inventor · disambiguated record
Kenji Yaegashi
Also filed as: YAEGASHI KENJI
5 granted patents·3 pending applications·18 citations·filing 1999–2024
70Inventor score
Top patents by PatentIndex Score
8 records- 0172US9927701B2Detection apparatus, imprint apparatus, and method of manufacturing articleCANON KK·Filed 2014·Granted Mar 27, 2018·2 cites·18 claims
- 0264US12481228B2Object alignment method, imprint method, article manufacturing method, detection apparatus, imprint apparatus, mold, and substrateCANON KK·Filed 2023·Granted Nov 25, 2025·0 cites·9 claims
- 0362US11181363B2Measurement device, imprint apparatus, method for manufacturing product, light amount determination method, and light amount adjustment methodCANON KK·Filed 2017·Granted Nov 23, 2021·1 cites·10 claims
- 0462US2024393683A1Substrate processing system and article manufacturing methodCANON KK·Filed 2024·Application pending·0 cites
- 0557US2025069892A1Planarization method and method of manufacturing articleCANON KK·Filed 2024·Application pending·0 cites
- 0652US11673313B2Imprint apparatus and article manufacturing methodCANON KK·Filed 2020·Granted Jun 13, 2023·0 cites·9 claims
- 0743US7181414B1Electronic toll collection system for toll roadMATSUSHITA ELECTRIC INDUSTRIAL CO LTD·Filed 1999·Granted Feb 20, 2007·15 cites·11 claims
- 0840US2013285270A1Transfer apparatus and method of manufacturing articleCANON KK·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →