Inventor · disambiguated record
Ki Sang Eum
Also filed as: EUM KI SANG
12 granted patents·5 pending applications·0 citations·filing 2015–2024
78Inventor score
Top patents by PatentIndex Score
17 records- 0166US12476119B2Substrate processing apparatus and substrate processing methodSEMES CO LTD·Filed 2023·Granted Nov 18, 2025·0 cites·15 claims
- 0265US12429042B2Torsion pump and chemical liquid supply unitSEMES CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·20 claims
- 0360US12331736B2Pump, chemical liquid supplying unit, and substrate treating apparatusSEMES CO LTD·Filed 2022·Granted Jun 17, 2025·0 cites·20 claims
- 0460US2025198833A1Transfer unit, and substrate processing apparatus including the sameSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0558US12174553B2Support unit, bake apparatus and substrate treating apparatus including the sameSEMES CO LTD·Filed 2022·Granted Dec 24, 2024·0 cites·18 claims
- 0658US2025155817A1Substrate treating apparatusSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0756US12125717B2Apparatus for treating substrateSEMES CO LTD·Filed 2021·Granted Oct 22, 2024·0 cites·19 claims
- 0854US12140868B2Substrate treating apparatus with exhaust airflow guideSEMES CO LTD·Filed 2022·Granted Nov 12, 2024·0 cites·20 claims
- 0952US12228861B2Apparatus for treating substrateSEMES CO LTD·Filed 2021·Granted Feb 18, 2025·0 cites·8 claims
- 1051US12428730B2Apparatus for treating substrateSEMES CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·18 claims
- 1150US2023060309A1Torsion pump, chemical liquid supplying apparatus, and substrate treating apparatusSEMES CO LTD·Filed 2022·Application pending·0 cites
- 1249US12124169B2Nozzle standby port, apparatus for treating substrate including the same and method for cleaning nozzle using the sameSEMES CO LTD·Filed 2021·Granted Oct 22, 2024·0 cites·12 claims
- 1348US11782348B2Apparatus for treating substrateSEMES CO LTD·Filed 2021·Granted Oct 10, 2023·0 cites·11 claims
- 1446US11656557B2Apparatus for treating substrateSEMES CO LTD·Filed 2021·Granted May 23, 2023·0 cites·18 claims
- 1543US11766765B2Substrate treatment apparatusSEMES CO LTD·Filed 2019·Granted Sep 26, 2023·0 cites·13 claims
- 1631US2015303036A1Substrate treatment apparatus including sealing member having atypical sectionSAMSUNG ELECTRONICS CO LTD·Filed 2015·Application pending·0 cites
- 1730US2016035601A1Bake unit, substrate treating apparatus including the unit, and substrate treating methodSEMES CO LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →