Inventor · disambiguated record
Kiyofumi Nishii
Also filed as: NISHII KIYOFUMI
3 granted patents·663 citations·filing 1991–1995
78Inventor score
Technology areasH10P
Files withDAINIPPON SCREEN MFG3
Top patents by PatentIndex Score
3 records- 0196US5315092AApparatus for heat-treating wafer by light-irradiation and device for measuring temperature of substrate used in such apparatusDAINIPPON SCREEN MFG·Filed 1991·Granted May 24, 1994·609 cites·22 claims
- 0264US5611685ASubstrate heat treatment apparatusDAINIPPON SCREEN MFG·Filed 1995·Granted Mar 18, 1997·31 cites·17 claims
- 0352US5405446AApparatus for heat processing a substrateDAINIPPON SCREEN MFG·Filed 1994·Granted Apr 11, 1995·23 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →